8/2/2010	12:04:17 AM	Helium valve closed
8/2/2010	12:04:17 AM	PH3 valve closed
8/2/2010	12:04:17 AM	Main Vac valve closed
8/2/2010	12:04:17 AM	Bypass valve closed
8/2/2010	12:04:17 AM	H2 valve opened
8/2/2010	12:04:17 AM	BCl3 valve opened
8/2/2010	12:04:17 AM	SiCl4 pre valve opened
8/2/2010	12:04:17 AM	SiCl4 post valve opened
8/2/2010	12:04:17 AM	Bubbler valve opened
8/2/2010	12:04:17 AM	Helium MFC set to  0.000000
8/2/2010	12:04:17 AM	H2 MFC set to  500.000000
8/2/2010	12:04:17 AM	BCl3 MFC set to  29.000000
8/2/2010	12:04:17 AM	PHl3 MFC set to  0.000000
8/2/2010	12:04:17 AM	SiCl4 MFC set to  50.000000
8/2/2010	12:04:17 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	12:04:17 AM	Tube furnace set to 1000
8/2/2010	12:14:17 AM	H2 valve closed
8/2/2010	12:14:17 AM	BCl3 valve closed
8/2/2010	12:14:17 AM	PH3 valve closed
8/2/2010	12:14:17 AM	SiCl4 pre valve closed
8/2/2010	12:14:17 AM	SiCl4 post valve closed
8/2/2010	12:14:17 AM	Main Vac valve closed
8/2/2010	12:14:17 AM	Bypass valve closed
8/2/2010	12:14:17 AM	Helium valve opened
8/2/2010	12:14:17 AM	Bubbler valve opened
8/2/2010	12:14:17 AM	Helium MFC set to  500.000000
8/2/2010	12:14:17 AM	H2 MFC set to  0.000000
8/2/2010	12:14:17 AM	BCl3 MFC set to  0.000000
8/2/2010	12:14:17 AM	PHl3 MFC set to  0.000000
8/2/2010	12:14:17 AM	SiCl4 MFC set to  0.000000
8/2/2010	12:14:17 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	12:14:17 AM	Tube furnace set to 0
8/2/2010	12:34:17 AM	Helium valve closed
8/2/2010	12:34:17 AM	H2 valve closed
8/2/2010	12:34:17 AM	BCl3 valve closed
8/2/2010	12:34:17 AM	PH3 valve closed
8/2/2010	12:34:17 AM	SiCl4 pre valve closed
8/2/2010	12:34:17 AM	SiCl4 post valve closed
8/2/2010	12:34:17 AM	Main Vac valve closed
8/2/2010	12:34:17 AM	Bypass valve closed
8/2/2010	12:34:17 AM	Bubbler valve closed
8/2/2010	12:34:17 AM	Helium MFC set to  0.000000
8/2/2010	12:34:17 AM	H2 MFC set to  0.000000
8/2/2010	12:34:17 AM	BCl3 MFC set to  0.000000
8/2/2010	12:34:17 AM	PHl3 MFC set to  0.000000
8/2/2010	12:34:17 AM	SiCl4 MFC set to  0.000000
8/2/2010	12:34:17 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	12:34:17 AM	Tube furnace set to 0
8/2/2010	12:34:18 AM	Run finished at 12:34 AM
8/2/2010	12:44:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/2/2010	12:44:22 AM	Recipe started at 12:44 AM
8/2/2010	12:44:22 AM	Helium valve closed
8/2/2010	12:44:22 AM	H2 valve closed
8/2/2010	12:44:22 AM	BCl3 valve closed
8/2/2010	12:44:22 AM	PH3 valve closed
8/2/2010	12:44:22 AM	SiCl4 pre valve closed
8/2/2010	12:44:22 AM	SiCl4 post valve closed
8/2/2010	12:44:22 AM	Main Vac valve closed
8/2/2010	12:44:22 AM	Bubbler valve closed
8/2/2010	12:44:22 AM	Bypass valve opened
8/2/2010	12:44:22 AM	Helium MFC set to  0.000000
8/2/2010	12:44:22 AM	H2 MFC set to  0.000000
8/2/2010	12:44:22 AM	BCl3 MFC set to  0.000000
8/2/2010	12:44:22 AM	PHl3 MFC set to  0.000000
8/2/2010	12:44:22 AM	SiCl4 MFC set to  0.000000
8/2/2010	12:44:22 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	12:44:22 AM	Tube furnace set to 0
8/2/2010	12:44:56 AM	Helium valve closed
8/2/2010	12:44:56 AM	H2 valve closed
8/2/2010	12:44:56 AM	BCl3 valve closed
8/2/2010	12:44:56 AM	PH3 valve closed
8/2/2010	12:44:56 AM	SiCl4 pre valve closed
8/2/2010	12:44:56 AM	SiCl4 post valve closed
8/2/2010	12:44:56 AM	Bubbler valve closed
8/2/2010	12:44:56 AM	Main Vac valve opened
8/2/2010	12:44:56 AM	Bypass valve opened
8/2/2010	12:44:56 AM	Helium MFC set to  0.000000
8/2/2010	12:44:56 AM	H2 MFC set to  0.000000
8/2/2010	12:44:56 AM	BCl3 MFC set to  0.000000
8/2/2010	12:44:56 AM	PHl3 MFC set to  0.000000
8/2/2010	12:44:56 AM	SiCl4 MFC set to  0.000000
8/2/2010	12:44:56 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	12:44:56 AM	Tube furnace set to 0
8/2/2010	12:44:57 AM	Run finished at 12:44 AM
8/2/2010	12:44:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/2/2010	9:58:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/2/2010	9:58:34 AM	Recipe started at 9:58 AM
8/2/2010	9:58:34 AM	H2 valve closed
8/2/2010	9:58:34 AM	BCl3 valve closed
8/2/2010	9:58:34 AM	PH3 valve closed
8/2/2010	9:58:34 AM	SiCl4 pre valve closed
8/2/2010	9:58:34 AM	SiCl4 post valve closed
8/2/2010	9:58:34 AM	Main Vac valve closed
8/2/2010	9:58:34 AM	Bypass valve closed
8/2/2010	9:58:34 AM	Bubbler valve closed
8/2/2010	9:58:35 AM	Helium valve opened
8/2/2010	9:58:35 AM	Helium MFC set to  500.000000
8/2/2010	9:58:35 AM	H2 MFC set to  0.000000
8/2/2010	9:58:35 AM	BCl3 MFC set to  0.000000
8/2/2010	9:58:35 AM	PHl3 MFC set to  0.000000
8/2/2010	9:58:35 AM	SiCl4 MFC set to  0.000000
8/2/2010	9:58:35 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	9:58:35 AM	Tube furnace set to 0
8/2/2010	9:59:10 AM	Helium valve closed
8/2/2010	9:59:10 AM	H2 valve closed
8/2/2010	9:59:10 AM	BCl3 valve closed
8/2/2010	9:59:10 AM	PH3 valve closed
8/2/2010	9:59:10 AM	SiCl4 pre valve closed
8/2/2010	9:59:10 AM	SiCl4 post valve closed
8/2/2010	9:59:10 AM	Main Vac valve closed
8/2/2010	9:59:10 AM	Bypass valve closed
8/2/2010	9:59:10 AM	Bubbler valve closed
8/2/2010	9:59:10 AM	Helium MFC set to  0.000000
8/2/2010	9:59:10 AM	H2 MFC set to  0.000000
8/2/2010	9:59:10 AM	BCl3 MFC set to  0.000000
8/2/2010	9:59:10 AM	PHl3 MFC set to  0.000000
8/2/2010	9:59:10 AM	SiCl4 MFC set to  0.000000
8/2/2010	9:59:10 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	9:59:10 AM	Tube furnace set to 0
8/2/2010	9:59:11 AM	Run finished at 9:59 AM
8/2/2010	9:59:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/2/2010	10:10:01 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/2/2010	10:10:01 AM	Recipe started at 10:10 AM
8/2/2010	10:10:01 AM	Helium valve closed
8/2/2010	10:10:01 AM	H2 valve closed
8/2/2010	10:10:01 AM	BCl3 valve closed
8/2/2010	10:10:01 AM	PH3 valve closed
8/2/2010	10:10:01 AM	SiCl4 pre valve closed
8/2/2010	10:10:01 AM	SiCl4 post valve closed
8/2/2010	10:10:01 AM	Main Vac valve closed
8/2/2010	10:10:01 AM	Bubbler valve closed
8/2/2010	10:10:01 AM	Bypass valve opened
8/2/2010	10:10:01 AM	Helium MFC set to  0.000000
8/2/2010	10:10:01 AM	H2 MFC set to  0.000000
8/2/2010	10:10:01 AM	BCl3 MFC set to  0.000000
8/2/2010	10:10:01 AM	PHl3 MFC set to  0.000000
8/2/2010	10:10:01 AM	SiCl4 MFC set to  0.000000
8/2/2010	10:10:01 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	10:10:02 AM	Tube furnace set to 0
8/2/2010	10:10:43 AM	Helium valve closed
8/2/2010	10:10:43 AM	H2 valve closed
8/2/2010	10:10:43 AM	BCl3 valve closed
8/2/2010	10:10:43 AM	PH3 valve closed
8/2/2010	10:10:43 AM	SiCl4 pre valve closed
8/2/2010	10:10:43 AM	SiCl4 post valve closed
8/2/2010	10:10:43 AM	Bubbler valve closed
8/2/2010	10:10:43 AM	Main Vac valve opened
8/2/2010	10:10:43 AM	Bypass valve opened
8/2/2010	10:10:43 AM	Helium MFC set to  0.000000
8/2/2010	10:10:43 AM	H2 MFC set to  0.000000
8/2/2010	10:10:43 AM	BCl3 MFC set to  0.000000
8/2/2010	10:10:43 AM	PHl3 MFC set to  0.000000
8/2/2010	10:10:43 AM	SiCl4 MFC set to  0.000000
8/2/2010	10:10:43 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	10:10:44 AM	Tube furnace set to 0
8/2/2010	10:10:44 AM	Run finished at 10:10 AM
8/2/2010	10:10:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/2/2010	10:11:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
8/2/2010	10:11:21 AM	Recipe started at 10:11 AM
8/2/2010	10:11:21 AM	H2 valve closed
8/2/2010	10:11:21 AM	BCl3 valve closed
8/2/2010	10:11:21 AM	PH3 valve closed
8/2/2010	10:11:21 AM	SiCl4 pre valve closed
8/2/2010	10:11:21 AM	SiCl4 post valve closed
8/2/2010	10:11:21 AM	Main Vac valve closed
8/2/2010	10:11:21 AM	Bypass valve closed
8/2/2010	10:11:21 AM	Bubbler valve closed
8/2/2010	10:11:21 AM	Helium valve opened
8/2/2010	10:11:21 AM	Helium MFC set to  500.000000
8/2/2010	10:11:21 AM	H2 MFC set to  0.000000
8/2/2010	10:11:21 AM	BCl3 MFC set to  0.000000
8/2/2010	10:11:21 AM	PHl3 MFC set to  0.000000
8/2/2010	10:11:21 AM	SiCl4 MFC set to  0.000000
8/2/2010	10:11:21 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	10:11:21 AM	Tube furnace set to 0
8/2/2010	10:12:43 AM	Helium valve closed
8/2/2010	10:12:43 AM	H2 valve closed
8/2/2010	10:12:43 AM	BCl3 valve closed
8/2/2010	10:12:43 AM	PH3 valve closed
8/2/2010	10:12:43 AM	SiCl4 pre valve closed
8/2/2010	10:12:43 AM	SiCl4 post valve closed
8/2/2010	10:12:43 AM	Main Vac valve closed
8/2/2010	10:12:43 AM	Bypass valve closed
8/2/2010	10:12:43 AM	Bubbler valve closed
8/2/2010	10:12:43 AM	Helium MFC set to  0.000000
8/2/2010	10:12:43 AM	H2 MFC set to  0.000000
8/2/2010	10:12:43 AM	BCl3 MFC set to  0.000000
8/2/2010	10:12:43 AM	PHl3 MFC set to  0.000000
8/2/2010	10:12:43 AM	SiCl4 MFC set to  0.000000
8/2/2010	10:12:43 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	10:12:43 AM	Tube furnace set to 0
8/2/2010	10:12:58 AM	Helium valve closed
8/2/2010	10:12:58 AM	H2 valve closed
8/2/2010	10:12:58 AM	BCl3 valve closed
8/2/2010	10:12:58 AM	PH3 valve closed
8/2/2010	10:12:58 AM	SiCl4 pre valve closed
8/2/2010	10:12:58 AM	SiCl4 post valve closed
8/2/2010	10:12:58 AM	Main Vac valve closed
8/2/2010	10:12:58 AM	Bubbler valve closed
8/2/2010	10:12:58 AM	Bypass valve opened
8/2/2010	10:12:58 AM	Helium MFC set to  0.000000
8/2/2010	10:12:58 AM	H2 MFC set to  0.000000
8/2/2010	10:12:58 AM	BCl3 MFC set to  0.000000
8/2/2010	10:12:58 AM	PHl3 MFC set to  0.000000
8/2/2010	10:12:58 AM	SiCl4 MFC set to  0.000000
8/2/2010	10:12:58 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	10:12:58 AM	Tube furnace set to 0
8/2/2010	10:13:25 AM	Helium valve closed
8/2/2010	10:13:25 AM	H2 valve closed
8/2/2010	10:13:25 AM	BCl3 valve closed
8/2/2010	10:13:25 AM	PH3 valve closed
8/2/2010	10:13:25 AM	SiCl4 pre valve closed
8/2/2010	10:13:25 AM	SiCl4 post valve closed
8/2/2010	10:13:25 AM	Bubbler valve closed
8/2/2010	10:13:25 AM	Main Vac valve opened
8/2/2010	10:13:25 AM	Bypass valve opened
8/2/2010	10:13:25 AM	Helium MFC set to  0.000000
8/2/2010	10:13:25 AM	H2 MFC set to  0.000000
8/2/2010	10:13:25 AM	BCl3 MFC set to  0.000000
8/2/2010	10:13:25 AM	PHl3 MFC set to  0.000000
8/2/2010	10:13:25 AM	SiCl4 MFC set to  0.000000
8/2/2010	10:13:25 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	10:13:26 AM	Tube furnace set to 0
8/2/2010	10:18:26 AM	H2 valve closed
8/2/2010	10:18:26 AM	BCl3 valve closed
8/2/2010	10:18:26 AM	PH3 valve closed
8/2/2010	10:18:26 AM	SiCl4 pre valve closed
8/2/2010	10:18:26 AM	SiCl4 post valve closed
8/2/2010	10:18:26 AM	Main Vac valve closed
8/2/2010	10:18:26 AM	Bypass valve closed
8/2/2010	10:18:26 AM	Bubbler valve closed
8/2/2010	10:18:26 AM	Helium valve opened
8/2/2010	10:18:26 AM	Helium MFC set to  500.000000
8/2/2010	10:18:26 AM	H2 MFC set to  0.000000
8/2/2010	10:18:26 AM	BCl3 MFC set to  0.000000
8/2/2010	10:18:26 AM	PHl3 MFC set to  0.000000
8/2/2010	10:18:26 AM	SiCl4 MFC set to  0.000000
8/2/2010	10:18:26 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	10:18:26 AM	Tube furnace set to 0
8/2/2010	10:19:47 AM	Helium valve closed
8/2/2010	10:19:48 AM	H2 valve closed
8/2/2010	10:19:48 AM	BCl3 valve closed
8/2/2010	10:19:48 AM	PH3 valve closed
8/2/2010	10:19:48 AM	SiCl4 pre valve closed
8/2/2010	10:19:48 AM	SiCl4 post valve closed
8/2/2010	10:19:48 AM	Main Vac valve closed
8/2/2010	10:19:48 AM	Bypass valve closed
8/2/2010	10:19:48 AM	Bubbler valve closed
8/2/2010	10:19:48 AM	Helium MFC set to  0.000000
8/2/2010	10:19:48 AM	H2 MFC set to  0.000000
8/2/2010	10:19:48 AM	BCl3 MFC set to  0.000000
8/2/2010	10:19:48 AM	PHl3 MFC set to  0.000000
8/2/2010	10:19:48 AM	SiCl4 MFC set to  0.000000
8/2/2010	10:19:48 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	10:19:48 AM	Tube furnace set to 0
8/2/2010	10:20:03 AM	Helium valve closed
8/2/2010	10:20:03 AM	H2 valve closed
8/2/2010	10:20:03 AM	BCl3 valve closed
8/2/2010	10:20:03 AM	PH3 valve closed
8/2/2010	10:20:03 AM	SiCl4 pre valve closed
8/2/2010	10:20:03 AM	SiCl4 post valve closed
8/2/2010	10:20:03 AM	Main Vac valve closed
8/2/2010	10:20:03 AM	Bubbler valve closed
8/2/2010	10:20:03 AM	Bypass valve opened
8/2/2010	10:20:03 AM	Helium MFC set to  0.000000
8/2/2010	10:20:03 AM	H2 MFC set to  0.000000
8/2/2010	10:20:03 AM	BCl3 MFC set to  0.000000
8/2/2010	10:20:03 AM	PHl3 MFC set to  0.000000
8/2/2010	10:20:03 AM	SiCl4 MFC set to  0.000000
8/2/2010	10:20:03 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	10:20:03 AM	Tube furnace set to 0
8/2/2010	10:20:30 AM	Helium valve closed
8/2/2010	10:20:30 AM	H2 valve closed
8/2/2010	10:20:30 AM	BCl3 valve closed
8/2/2010	10:20:30 AM	PH3 valve closed
8/2/2010	10:20:30 AM	SiCl4 pre valve closed
8/2/2010	10:20:30 AM	SiCl4 post valve closed
8/2/2010	10:20:30 AM	Bubbler valve closed
8/2/2010	10:20:30 AM	Main Vac valve opened
8/2/2010	10:20:30 AM	Bypass valve opened
8/2/2010	10:20:30 AM	Helium MFC set to  0.000000
8/2/2010	10:20:30 AM	H2 MFC set to  0.000000
8/2/2010	10:20:30 AM	BCl3 MFC set to  0.000000
8/2/2010	10:20:30 AM	PHl3 MFC set to  0.000000
8/2/2010	10:20:30 AM	SiCl4 MFC set to  0.000000
8/2/2010	10:20:30 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	10:20:30 AM	Tube furnace set to 0
8/2/2010	10:25:30 AM	H2 valve closed
8/2/2010	10:25:30 AM	BCl3 valve closed
8/2/2010	10:25:30 AM	PH3 valve closed
8/2/2010	10:25:30 AM	SiCl4 pre valve closed
8/2/2010	10:25:30 AM	SiCl4 post valve closed
8/2/2010	10:25:30 AM	Main Vac valve closed
8/2/2010	10:25:30 AM	Bypass valve closed
8/2/2010	10:25:30 AM	Bubbler valve closed
8/2/2010	10:25:30 AM	Helium valve opened
8/2/2010	10:25:30 AM	Helium MFC set to  500.000000
8/2/2010	10:25:30 AM	H2 MFC set to  0.000000
8/2/2010	10:25:30 AM	BCl3 MFC set to  0.000000
8/2/2010	10:25:30 AM	PHl3 MFC set to  0.000000
8/2/2010	10:25:30 AM	SiCl4 MFC set to  0.000000
8/2/2010	10:25:30 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	10:25:31 AM	Tube furnace set to 0
8/2/2010	10:26:52 AM	Helium valve closed
8/2/2010	10:26:52 AM	H2 valve closed
8/2/2010	10:26:52 AM	BCl3 valve closed
8/2/2010	10:26:52 AM	PH3 valve closed
8/2/2010	10:26:52 AM	SiCl4 pre valve closed
8/2/2010	10:26:52 AM	SiCl4 post valve closed
8/2/2010	10:26:52 AM	Main Vac valve closed
8/2/2010	10:26:52 AM	Bypass valve closed
8/2/2010	10:26:52 AM	Bubbler valve closed
8/2/2010	10:26:52 AM	Helium MFC set to  0.000000
8/2/2010	10:26:52 AM	H2 MFC set to  0.000000
8/2/2010	10:26:52 AM	BCl3 MFC set to  0.000000
8/2/2010	10:26:52 AM	PHl3 MFC set to  0.000000
8/2/2010	10:26:52 AM	SiCl4 MFC set to  0.000000
8/2/2010	10:26:52 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	10:26:52 AM	Tube furnace set to 0
8/2/2010	10:27:07 AM	Helium valve closed
8/2/2010	10:27:07 AM	H2 valve closed
8/2/2010	10:27:07 AM	BCl3 valve closed
8/2/2010	10:27:07 AM	PH3 valve closed
8/2/2010	10:27:07 AM	SiCl4 pre valve closed
8/2/2010	10:27:07 AM	SiCl4 post valve closed
8/2/2010	10:27:07 AM	Main Vac valve closed
8/2/2010	10:27:07 AM	Bubbler valve closed
8/2/2010	10:27:07 AM	Bypass valve opened
8/2/2010	10:27:07 AM	Helium MFC set to  0.000000
8/2/2010	10:27:07 AM	H2 MFC set to  0.000000
8/2/2010	10:27:08 AM	BCl3 MFC set to  0.000000
8/2/2010	10:27:08 AM	PHl3 MFC set to  0.000000
8/2/2010	10:27:08 AM	SiCl4 MFC set to  0.000000
8/2/2010	10:27:08 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	10:27:08 AM	Tube furnace set to 0
8/2/2010	10:27:35 AM	Helium valve closed
8/2/2010	10:27:35 AM	H2 valve closed
8/2/2010	10:27:35 AM	BCl3 valve closed
8/2/2010	10:27:35 AM	PH3 valve closed
8/2/2010	10:27:35 AM	SiCl4 pre valve closed
8/2/2010	10:27:35 AM	SiCl4 post valve closed
8/2/2010	10:27:35 AM	Bubbler valve closed
8/2/2010	10:27:35 AM	Main Vac valve opened
8/2/2010	10:27:35 AM	Bypass valve opened
8/2/2010	10:27:35 AM	Helium MFC set to  0.000000
8/2/2010	10:27:35 AM	H2 MFC set to  0.000000
8/2/2010	10:27:35 AM	BCl3 MFC set to  0.000000
8/2/2010	10:27:35 AM	PHl3 MFC set to  0.000000
8/2/2010	10:27:35 AM	SiCl4 MFC set to  0.000000
8/2/2010	10:27:35 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	10:27:35 AM	Tube furnace set to 0
8/2/2010	10:32:35 AM	Helium valve closed
8/2/2010	10:32:35 AM	H2 valve closed
8/2/2010	10:32:35 AM	BCl3 valve closed
8/2/2010	10:32:35 AM	PH3 valve closed
8/2/2010	10:32:35 AM	SiCl4 pre valve closed
8/2/2010	10:32:35 AM	SiCl4 post valve closed
8/2/2010	10:32:35 AM	Bubbler valve closed
8/2/2010	10:32:35 AM	Main Vac valve opened
8/2/2010	10:32:35 AM	Bypass valve opened
8/2/2010	10:32:35 AM	Helium MFC set to  0.000000
8/2/2010	10:32:35 AM	H2 MFC set to  0.000000
8/2/2010	10:32:35 AM	BCl3 MFC set to  0.000000
8/2/2010	10:32:35 AM	PHl3 MFC set to  0.000000
8/2/2010	10:32:35 AM	SiCl4 MFC set to  0.000000
8/2/2010	10:32:35 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	10:32:35 AM	Tube furnace set to 0
8/2/2010	10:32:36 AM	Run finished at 10:32 AM
8/2/2010	10:32:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
8/2/2010	11:00:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/2/2010	11:00:55 AM	Recipe started at 11:00 AM
8/2/2010	11:00:55 AM	Helium valve closed
8/2/2010	11:00:55 AM	H2 valve closed
8/2/2010	11:00:55 AM	BCl3 valve closed
8/2/2010	11:00:55 AM	PH3 valve closed
8/2/2010	11:00:55 AM	SiCl4 pre valve closed
8/2/2010	11:00:55 AM	SiCl4 post valve closed
8/2/2010	11:00:55 AM	Main Vac valve closed
8/2/2010	11:00:55 AM	Bubbler valve closed
8/2/2010	11:00:55 AM	Bypass valve opened
8/2/2010	11:00:55 AM	Helium MFC set to  0.000000
8/2/2010	11:00:55 AM	H2 MFC set to  0.000000
8/2/2010	11:00:55 AM	BCl3 MFC set to  0.000000
8/2/2010	11:00:55 AM	PHl3 MFC set to  0.000000
8/2/2010	11:00:55 AM	SiCl4 MFC set to  0.000000
8/2/2010	11:00:55 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	11:00:55 AM	Tube furnace set to 0
8/2/2010	11:00:55 AM	Helium valve closed
8/2/2010	11:00:55 AM	H2 valve closed
8/2/2010	11:00:55 AM	BCl3 valve closed
8/2/2010	11:00:55 AM	PH3 valve closed
8/2/2010	11:00:55 AM	SiCl4 pre valve closed
8/2/2010	11:00:55 AM	SiCl4 post valve closed
8/2/2010	11:00:55 AM	Bubbler valve closed
8/2/2010	11:00:55 AM	Main Vac valve opened
8/2/2010	11:00:55 AM	Bypass valve opened
8/2/2010	11:00:55 AM	Helium MFC set to  0.000000
8/2/2010	11:00:55 AM	H2 MFC set to  0.000000
8/2/2010	11:00:55 AM	BCl3 MFC set to  0.000000
8/2/2010	11:00:55 AM	PHl3 MFC set to  0.000000
8/2/2010	11:00:55 AM	SiCl4 MFC set to  0.000000
8/2/2010	11:00:55 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	11:00:56 AM	Tube furnace set to 0
8/2/2010	11:01:56 AM	H2 valve closed
8/2/2010	11:01:56 AM	BCl3 valve closed
8/2/2010	11:01:56 AM	PH3 valve closed
8/2/2010	11:01:56 AM	SiCl4 pre valve closed
8/2/2010	11:01:56 AM	SiCl4 post valve closed
8/2/2010	11:01:56 AM	Bubbler valve closed
8/2/2010	11:01:56 AM	Helium valve opened
8/2/2010	11:01:56 AM	Main Vac valve opened
8/2/2010	11:01:56 AM	Bypass valve opened
8/2/2010	11:01:56 AM	Helium MFC set to  100.000000
8/2/2010	11:01:56 AM	H2 MFC set to  0.000000
8/2/2010	11:01:56 AM	BCl3 MFC set to  0.000000
8/2/2010	11:01:56 AM	PHl3 MFC set to  0.000000
8/2/2010	11:01:56 AM	SiCl4 MFC set to  0.000000
8/2/2010	11:01:56 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	11:01:56 AM	Tube furnace set to 0
8/2/2010	11:10:56 AM	Helium valve closed
8/2/2010	11:10:56 AM	H2 valve closed
8/2/2010	11:10:56 AM	BCl3 valve closed
8/2/2010	11:10:56 AM	PH3 valve closed
8/2/2010	11:10:56 AM	SiCl4 pre valve closed
8/2/2010	11:10:56 AM	SiCl4 post valve closed
8/2/2010	11:10:56 AM	Bubbler valve closed
8/2/2010	11:10:56 AM	Main Vac valve opened
8/2/2010	11:10:56 AM	Bypass valve opened
8/2/2010	11:10:56 AM	Helium MFC set to  0.000000
8/2/2010	11:10:56 AM	H2 MFC set to  0.000000
8/2/2010	11:10:56 AM	BCl3 MFC set to  0.000000
8/2/2010	11:10:56 AM	PHl3 MFC set to  0.000000
8/2/2010	11:10:56 AM	SiCl4 MFC set to  0.000000
8/2/2010	11:10:56 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	11:10:56 AM	Tube furnace set to 0
8/2/2010	11:11:56 AM	H2 valve closed
8/2/2010	11:11:56 AM	BCl3 valve closed
8/2/2010	11:11:56 AM	PH3 valve closed
8/2/2010	11:11:56 AM	SiCl4 pre valve closed
8/2/2010	11:11:56 AM	SiCl4 post valve closed
8/2/2010	11:11:56 AM	Bubbler valve closed
8/2/2010	11:11:56 AM	Helium valve opened
8/2/2010	11:11:56 AM	Main Vac valve opened
8/2/2010	11:11:56 AM	Bypass valve opened
8/2/2010	11:11:56 AM	Helium MFC set to  100.000000
8/2/2010	11:11:56 AM	H2 MFC set to  0.000000
8/2/2010	11:11:56 AM	BCl3 MFC set to  0.000000
8/2/2010	11:11:56 AM	PHl3 MFC set to  0.000000
8/2/2010	11:11:56 AM	SiCl4 MFC set to  0.000000
8/2/2010	11:11:56 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	11:11:56 AM	Tube furnace set to 0
8/2/2010	11:20:56 AM	Helium valve closed
8/2/2010	11:20:56 AM	H2 valve closed
8/2/2010	11:20:56 AM	BCl3 valve closed
8/2/2010	11:20:56 AM	PH3 valve closed
8/2/2010	11:20:56 AM	SiCl4 pre valve closed
8/2/2010	11:20:56 AM	SiCl4 post valve closed
8/2/2010	11:20:56 AM	Bubbler valve closed
8/2/2010	11:20:56 AM	Main Vac valve opened
8/2/2010	11:20:56 AM	Bypass valve opened
8/2/2010	11:20:56 AM	Helium MFC set to  0.000000
8/2/2010	11:20:56 AM	H2 MFC set to  0.000000
8/2/2010	11:20:56 AM	BCl3 MFC set to  0.000000
8/2/2010	11:20:56 AM	PHl3 MFC set to  0.000000
8/2/2010	11:20:56 AM	SiCl4 MFC set to  0.000000
8/2/2010	11:20:56 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	11:20:56 AM	Tube furnace set to 0
8/2/2010	11:21:56 AM	H2 valve closed
8/2/2010	11:21:56 AM	BCl3 valve closed
8/2/2010	11:21:56 AM	PH3 valve closed
8/2/2010	11:21:56 AM	SiCl4 pre valve closed
8/2/2010	11:21:56 AM	SiCl4 post valve closed
8/2/2010	11:21:56 AM	Bubbler valve closed
8/2/2010	11:21:56 AM	Helium valve opened
8/2/2010	11:21:56 AM	Main Vac valve opened
8/2/2010	11:21:56 AM	Bypass valve opened
8/2/2010	11:21:56 AM	Helium MFC set to  100.000000
8/2/2010	11:21:56 AM	H2 MFC set to  0.000000
8/2/2010	11:21:56 AM	BCl3 MFC set to  0.000000
8/2/2010	11:21:56 AM	PHl3 MFC set to  0.000000
8/2/2010	11:21:56 AM	SiCl4 MFC set to  0.000000
8/2/2010	11:21:56 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	11:21:57 AM	Tube furnace set to 0
8/2/2010	11:30:57 AM	Helium valve closed
8/2/2010	11:30:57 AM	H2 valve closed
8/2/2010	11:30:57 AM	BCl3 valve closed
8/2/2010	11:30:57 AM	PH3 valve closed
8/2/2010	11:30:57 AM	SiCl4 pre valve closed
8/2/2010	11:30:57 AM	SiCl4 post valve closed
8/2/2010	11:30:57 AM	Bubbler valve closed
8/2/2010	11:30:57 AM	Main Vac valve opened
8/2/2010	11:30:57 AM	Bypass valve opened
8/2/2010	11:30:57 AM	Helium MFC set to  0.000000
8/2/2010	11:30:57 AM	H2 MFC set to  0.000000
8/2/2010	11:30:57 AM	BCl3 MFC set to  0.000000
8/2/2010	11:30:57 AM	PHl3 MFC set to  0.000000
8/2/2010	11:30:57 AM	SiCl4 MFC set to  0.000000
8/2/2010	11:30:57 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	11:30:57 AM	Tube furnace set to 0
8/2/2010	11:30:58 AM	Run finished at 11:30 AM
8/2/2010	11:30:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/2/2010	11:45:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/2/2010	11:45:18 AM	Recipe started at 11:45 AM
8/2/2010	11:45:18 AM	Helium valve closed
8/2/2010	11:45:18 AM	H2 valve closed
8/2/2010	11:45:18 AM	BCl3 valve closed
8/2/2010	11:45:18 AM	PH3 valve closed
8/2/2010	11:45:18 AM	SiCl4 pre valve closed
8/2/2010	11:45:18 AM	SiCl4 post valve closed
8/2/2010	11:45:18 AM	Main Vac valve closed
8/2/2010	11:45:18 AM	Bubbler valve closed
8/2/2010	11:45:18 AM	Bypass valve opened
8/2/2010	11:45:18 AM	Helium MFC set to  0.000000
8/2/2010	11:45:18 AM	H2 MFC set to  0.000000
8/2/2010	11:45:18 AM	BCl3 MFC set to  0.000000
8/2/2010	11:45:18 AM	PHl3 MFC set to  0.000000
8/2/2010	11:45:18 AM	SiCl4 MFC set to  0.000000
8/2/2010	11:45:18 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	11:45:18 AM	Tube furnace set to 0
8/2/2010	11:45:19 AM	Helium valve closed
8/2/2010	11:45:19 AM	H2 valve closed
8/2/2010	11:45:19 AM	BCl3 valve closed
8/2/2010	11:45:19 AM	PH3 valve closed
8/2/2010	11:45:19 AM	SiCl4 pre valve closed
8/2/2010	11:45:19 AM	SiCl4 post valve closed
8/2/2010	11:45:19 AM	Bubbler valve closed
8/2/2010	11:45:19 AM	Main Vac valve opened
8/2/2010	11:45:19 AM	Bypass valve opened
8/2/2010	11:45:19 AM	Helium MFC set to  0.000000
8/2/2010	11:45:19 AM	H2 MFC set to  0.000000
8/2/2010	11:45:19 AM	BCl3 MFC set to  0.000000
8/2/2010	11:45:19 AM	PHl3 MFC set to  0.000000
8/2/2010	11:45:19 AM	SiCl4 MFC set to  0.000000
8/2/2010	11:45:19 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	11:45:19 AM	Tube furnace set to 0
8/2/2010	11:46:19 AM	H2 valve closed
8/2/2010	11:46:19 AM	BCl3 valve closed
8/2/2010	11:46:19 AM	PH3 valve closed
8/2/2010	11:46:19 AM	SiCl4 pre valve closed
8/2/2010	11:46:19 AM	SiCl4 post valve closed
8/2/2010	11:46:19 AM	Bubbler valve closed
8/2/2010	11:46:19 AM	Helium valve opened
8/2/2010	11:46:19 AM	Main Vac valve opened
8/2/2010	11:46:19 AM	Bypass valve opened
8/2/2010	11:46:19 AM	Helium MFC set to  100.000000
8/2/2010	11:46:19 AM	H2 MFC set to  0.000000
8/2/2010	11:46:19 AM	BCl3 MFC set to  0.000000
8/2/2010	11:46:19 AM	PHl3 MFC set to  0.000000
8/2/2010	11:46:19 AM	SiCl4 MFC set to  0.000000
8/2/2010	11:46:19 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	11:46:19 AM	Tube furnace set to 0
8/2/2010	11:55:19 AM	Helium valve closed
8/2/2010	11:55:19 AM	H2 valve closed
8/2/2010	11:55:19 AM	BCl3 valve closed
8/2/2010	11:55:19 AM	PH3 valve closed
8/2/2010	11:55:19 AM	SiCl4 pre valve closed
8/2/2010	11:55:19 AM	SiCl4 post valve closed
8/2/2010	11:55:19 AM	Bubbler valve closed
8/2/2010	11:55:19 AM	Main Vac valve opened
8/2/2010	11:55:19 AM	Bypass valve opened
8/2/2010	11:55:19 AM	Helium MFC set to  0.000000
8/2/2010	11:55:19 AM	H2 MFC set to  0.000000
8/2/2010	11:55:19 AM	BCl3 MFC set to  0.000000
8/2/2010	11:55:19 AM	PHl3 MFC set to  0.000000
8/2/2010	11:55:19 AM	SiCl4 MFC set to  0.000000
8/2/2010	11:55:19 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	11:55:19 AM	Tube furnace set to 0
8/2/2010	11:56:19 AM	H2 valve closed
8/2/2010	11:56:19 AM	BCl3 valve closed
8/2/2010	11:56:19 AM	PH3 valve closed
8/2/2010	11:56:19 AM	SiCl4 pre valve closed
8/2/2010	11:56:19 AM	SiCl4 post valve closed
8/2/2010	11:56:19 AM	Bubbler valve closed
8/2/2010	11:56:19 AM	Helium valve opened
8/2/2010	11:56:19 AM	Main Vac valve opened
8/2/2010	11:56:19 AM	Bypass valve opened
8/2/2010	11:56:19 AM	Helium MFC set to  100.000000
8/2/2010	11:56:19 AM	H2 MFC set to  0.000000
8/2/2010	11:56:19 AM	BCl3 MFC set to  0.000000
8/2/2010	11:56:19 AM	PHl3 MFC set to  0.000000
8/2/2010	11:56:19 AM	SiCl4 MFC set to  0.000000
8/2/2010	11:56:19 AM	Bypass solenoid MFC set to  0.000000
8/2/2010	11:56:19 AM	Tube furnace set to 0
8/2/2010	12:05:19 PM	Helium valve closed
8/2/2010	12:05:19 PM	H2 valve closed
8/2/2010	12:05:19 PM	BCl3 valve closed
8/2/2010	12:05:19 PM	PH3 valve closed
8/2/2010	12:05:19 PM	SiCl4 pre valve closed
8/2/2010	12:05:19 PM	SiCl4 post valve closed
8/2/2010	12:05:19 PM	Bubbler valve closed
8/2/2010	12:05:19 PM	Main Vac valve opened
8/2/2010	12:05:19 PM	Bypass valve opened
8/2/2010	12:05:19 PM	Helium MFC set to  0.000000
8/2/2010	12:05:19 PM	H2 MFC set to  0.000000
8/2/2010	12:05:19 PM	BCl3 MFC set to  0.000000
8/2/2010	12:05:19 PM	PHl3 MFC set to  0.000000
8/2/2010	12:05:19 PM	SiCl4 MFC set to  0.000000
8/2/2010	12:05:19 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	12:05:19 PM	Tube furnace set to 0
8/2/2010	12:06:19 PM	H2 valve closed
8/2/2010	12:06:19 PM	BCl3 valve closed
8/2/2010	12:06:19 PM	PH3 valve closed
8/2/2010	12:06:19 PM	SiCl4 pre valve closed
8/2/2010	12:06:19 PM	SiCl4 post valve closed
8/2/2010	12:06:19 PM	Bubbler valve closed
8/2/2010	12:06:20 PM	Helium valve opened
8/2/2010	12:06:20 PM	Main Vac valve opened
8/2/2010	12:06:20 PM	Bypass valve opened
8/2/2010	12:06:20 PM	Helium MFC set to  100.000000
8/2/2010	12:06:20 PM	H2 MFC set to  0.000000
8/2/2010	12:06:20 PM	BCl3 MFC set to  0.000000
8/2/2010	12:06:20 PM	PHl3 MFC set to  0.000000
8/2/2010	12:06:20 PM	SiCl4 MFC set to  0.000000
8/2/2010	12:06:20 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	12:06:20 PM	Tube furnace set to 0
8/2/2010	12:15:20 PM	Helium valve closed
8/2/2010	12:15:20 PM	H2 valve closed
8/2/2010	12:15:20 PM	BCl3 valve closed
8/2/2010	12:15:20 PM	PH3 valve closed
8/2/2010	12:15:20 PM	SiCl4 pre valve closed
8/2/2010	12:15:20 PM	SiCl4 post valve closed
8/2/2010	12:15:20 PM	Bubbler valve closed
8/2/2010	12:15:20 PM	Main Vac valve opened
8/2/2010	12:15:20 PM	Bypass valve opened
8/2/2010	12:15:20 PM	Helium MFC set to  0.000000
8/2/2010	12:15:20 PM	H2 MFC set to  0.000000
8/2/2010	12:15:20 PM	BCl3 MFC set to  0.000000
8/2/2010	12:15:20 PM	PHl3 MFC set to  0.000000
8/2/2010	12:15:20 PM	SiCl4 MFC set to  0.000000
8/2/2010	12:15:20 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	12:15:20 PM	Tube furnace set to 0
8/2/2010	12:15:21 PM	Run finished at 12:15 PM
8/2/2010	12:15:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/2/2010	12:45:55 PM	Bypass valve closed
8/2/2010	12:45:56 PM	Main Vac valve closed
8/2/2010	12:46:06 PM	Main Vac valve opened
8/2/2010	12:47:56 PM	Bypass valve opened
8/2/2010	12:49:05 PM	Recipe started at 12:49 PM
8/2/2010	12:49:05 PM	Helium valve closed
8/2/2010	12:49:05 PM	BCl3 valve closed
8/2/2010	12:49:05 PM	PH3 valve closed
8/2/2010	12:49:05 PM	SiCl4 pre valve closed
8/2/2010	12:49:05 PM	SiCl4 post valve closed
8/2/2010	12:49:05 PM	Main Vac valve closed
8/2/2010	12:49:05 PM	Bypass valve closed
8/2/2010	12:49:05 PM	Bubbler valve closed
8/2/2010	12:49:05 PM	H2 valve opened
8/2/2010	12:49:05 PM	Helium MFC set to  0.000000
8/2/2010	12:49:05 PM	H2 MFC set to  500.000000
8/2/2010	12:49:05 PM	BCl3 MFC set to  0.000000
8/2/2010	12:49:05 PM	PHl3 MFC set to  0.000000
8/2/2010	12:49:05 PM	SiCl4 MFC set to  0.000000
8/2/2010	12:49:05 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	12:49:05 PM	Tube furnace set to 0
8/2/2010	12:50:27 PM	Helium valve closed
8/2/2010	12:50:27 PM	BCl3 valve closed
8/2/2010	12:50:27 PM	PH3 valve closed
8/2/2010	12:50:27 PM	SiCl4 pre valve closed
8/2/2010	12:50:27 PM	SiCl4 post valve closed
8/2/2010	12:50:27 PM	Main Vac valve closed
8/2/2010	12:50:27 PM	Bypass valve closed
8/2/2010	12:50:27 PM	H2 valve opened
8/2/2010	12:50:27 PM	Bubbler valve opened
8/2/2010	12:50:27 PM	Helium MFC set to  0.000000
8/2/2010	12:50:27 PM	H2 MFC set to  500.000000
8/2/2010	12:50:27 PM	BCl3 MFC set to  0.000000
8/2/2010	12:50:27 PM	PHl3 MFC set to  0.000000
8/2/2010	12:50:27 PM	SiCl4 MFC set to  0.000000
8/2/2010	12:50:27 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	12:50:28 PM	Tube furnace set to 1000
8/2/2010	1:10:28 PM	Helium valve closed
8/2/2010	1:10:28 PM	BCl3 valve closed
8/2/2010	1:10:28 PM	Main Vac valve closed
8/2/2010	1:10:28 PM	Bypass valve closed
8/2/2010	1:10:28 PM	H2 valve opened
8/2/2010	1:10:28 PM	PH3 valve opened
8/2/2010	1:10:28 PM	SiCl4 pre valve opened
8/2/2010	1:10:28 PM	SiCl4 post valve opened
8/2/2010	1:10:28 PM	Bubbler valve opened
8/2/2010	1:10:28 PM	Helium MFC set to  0.000000
8/2/2010	1:10:28 PM	H2 MFC set to  500.000000
8/2/2010	1:10:28 PM	BCl3 MFC set to  0.000000
8/2/2010	1:10:28 PM	PHl3 MFC set to  0.800000
8/2/2010	1:10:28 PM	SiCl4 MFC set to  50.000000
8/2/2010	1:10:28 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	1:10:28 PM	Tube furnace set to 1000
8/2/2010	1:30:28 PM	H2 valve closed
8/2/2010	1:30:28 PM	BCl3 valve closed
8/2/2010	1:30:28 PM	PH3 valve closed
8/2/2010	1:30:28 PM	SiCl4 pre valve closed
8/2/2010	1:30:28 PM	SiCl4 post valve closed
8/2/2010	1:30:28 PM	Main Vac valve closed
8/2/2010	1:30:28 PM	Bypass valve closed
8/2/2010	1:30:28 PM	Helium valve opened
8/2/2010	1:30:28 PM	Bubbler valve opened
8/2/2010	1:30:28 PM	Helium MFC set to  500.000000
8/2/2010	1:30:28 PM	H2 MFC set to  0.000000
8/2/2010	1:30:28 PM	BCl3 MFC set to  0.000000
8/2/2010	1:30:28 PM	PHl3 MFC set to  0.000000
8/2/2010	1:30:28 PM	SiCl4 MFC set to  0.000000
8/2/2010	1:30:28 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	1:30:28 PM	Tube furnace set to 0
8/2/2010	1:50:28 PM	Helium valve closed
8/2/2010	1:50:28 PM	H2 valve closed
8/2/2010	1:50:28 PM	BCl3 valve closed
8/2/2010	1:50:28 PM	PH3 valve closed
8/2/2010	1:50:28 PM	SiCl4 pre valve closed
8/2/2010	1:50:28 PM	SiCl4 post valve closed
8/2/2010	1:50:28 PM	Main Vac valve closed
8/2/2010	1:50:28 PM	Bypass valve closed
8/2/2010	1:50:28 PM	Bubbler valve closed
8/2/2010	1:50:28 PM	Helium MFC set to  0.000000
8/2/2010	1:50:28 PM	H2 MFC set to  0.000000
8/2/2010	1:50:28 PM	BCl3 MFC set to  0.000000
8/2/2010	1:50:28 PM	PHl3 MFC set to  0.000000
8/2/2010	1:50:28 PM	SiCl4 MFC set to  0.000000
8/2/2010	1:50:28 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	1:50:28 PM	Tube furnace set to 0
8/2/2010	1:50:28 PM	Run finished at 1:50 PM
8/2/2010	2:14:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/2/2010	2:14:12 PM	Recipe started at 2:14 PM
8/2/2010	2:14:12 PM	Helium valve closed
8/2/2010	2:14:12 PM	H2 valve closed
8/2/2010	2:14:12 PM	BCl3 valve closed
8/2/2010	2:14:12 PM	PH3 valve closed
8/2/2010	2:14:12 PM	SiCl4 pre valve closed
8/2/2010	2:14:12 PM	SiCl4 post valve closed
8/2/2010	2:14:12 PM	Main Vac valve closed
8/2/2010	2:14:12 PM	Bubbler valve closed
8/2/2010	2:14:12 PM	Bypass valve opened
8/2/2010	2:14:12 PM	Helium MFC set to  0.000000
8/2/2010	2:14:12 PM	H2 MFC set to  0.000000
8/2/2010	2:14:12 PM	BCl3 MFC set to  0.000000
8/2/2010	2:14:12 PM	PHl3 MFC set to  0.000000
8/2/2010	2:14:12 PM	SiCl4 MFC set to  0.000000
8/2/2010	2:14:12 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	2:14:12 PM	Tube furnace set to 0
8/2/2010	2:14:51 PM	Helium valve closed
8/2/2010	2:14:51 PM	H2 valve closed
8/2/2010	2:14:51 PM	BCl3 valve closed
8/2/2010	2:14:51 PM	PH3 valve closed
8/2/2010	2:14:51 PM	SiCl4 pre valve closed
8/2/2010	2:14:51 PM	SiCl4 post valve closed
8/2/2010	2:14:51 PM	Bubbler valve closed
8/2/2010	2:14:52 PM	Main Vac valve opened
8/2/2010	2:14:52 PM	Bypass valve opened
8/2/2010	2:14:52 PM	Helium MFC set to  0.000000
8/2/2010	2:14:52 PM	H2 MFC set to  0.000000
8/2/2010	2:14:52 PM	BCl3 MFC set to  0.000000
8/2/2010	2:14:52 PM	PHl3 MFC set to  0.000000
8/2/2010	2:14:52 PM	SiCl4 MFC set to  0.000000
8/2/2010	2:14:52 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	2:14:52 PM	Tube furnace set to 0
8/2/2010	2:14:52 PM	Run finished at 2:14 PM
8/2/2010	2:14:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/2/2010	2:15:59 PM	Bypass valve closed
8/2/2010	2:16:04 PM	Main Vac valve closed
8/2/2010	2:16:16 PM	Main Vac valve opened
8/2/2010	2:17:11 PM	Main Vac valve closed
8/2/2010	2:17:24 PM	Main Vac valve opened
8/2/2010	2:18:22 PM	Main Vac valve closed
8/2/2010	2:18:37 PM	Main Vac valve opened
8/2/2010	2:20:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
8/2/2010	2:20:23 PM	Recipe started at 2:20 PM
8/2/2010	2:20:23 PM	H2 valve closed
8/2/2010	2:20:23 PM	BCl3 valve closed
8/2/2010	2:20:23 PM	PH3 valve closed
8/2/2010	2:20:23 PM	SiCl4 pre valve closed
8/2/2010	2:20:23 PM	SiCl4 post valve closed
8/2/2010	2:20:23 PM	Main Vac valve closed
8/2/2010	2:20:23 PM	Bypass valve closed
8/2/2010	2:20:23 PM	Bubbler valve closed
8/2/2010	2:20:23 PM	Helium valve opened
8/2/2010	2:20:23 PM	Helium MFC set to  500.000000
8/2/2010	2:20:23 PM	H2 MFC set to  0.000000
8/2/2010	2:20:23 PM	BCl3 MFC set to  0.000000
8/2/2010	2:20:23 PM	PHl3 MFC set to  0.000000
8/2/2010	2:20:23 PM	SiCl4 MFC set to  0.000000
8/2/2010	2:20:23 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	2:20:23 PM	Tube furnace set to 0
8/2/2010	2:21:44 PM	Helium valve closed
8/2/2010	2:21:44 PM	H2 valve closed
8/2/2010	2:21:44 PM	BCl3 valve closed
8/2/2010	2:21:44 PM	PH3 valve closed
8/2/2010	2:21:44 PM	SiCl4 pre valve closed
8/2/2010	2:21:44 PM	SiCl4 post valve closed
8/2/2010	2:21:44 PM	Main Vac valve closed
8/2/2010	2:21:44 PM	Bypass valve closed
8/2/2010	2:21:44 PM	Bubbler valve closed
8/2/2010	2:21:44 PM	Helium MFC set to  0.000000
8/2/2010	2:21:44 PM	H2 MFC set to  0.000000
8/2/2010	2:21:44 PM	BCl3 MFC set to  0.000000
8/2/2010	2:21:44 PM	PHl3 MFC set to  0.000000
8/2/2010	2:21:44 PM	SiCl4 MFC set to  0.000000
8/2/2010	2:21:44 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	2:21:44 PM	Tube furnace set to 0
8/2/2010	2:21:59 PM	Helium valve closed
8/2/2010	2:21:59 PM	H2 valve closed
8/2/2010	2:21:59 PM	BCl3 valve closed
8/2/2010	2:21:59 PM	PH3 valve closed
8/2/2010	2:21:59 PM	SiCl4 pre valve closed
8/2/2010	2:21:59 PM	SiCl4 post valve closed
8/2/2010	2:21:59 PM	Main Vac valve closed
8/2/2010	2:21:59 PM	Bubbler valve closed
8/2/2010	2:21:59 PM	Bypass valve opened
8/2/2010	2:21:59 PM	Helium MFC set to  0.000000
8/2/2010	2:21:59 PM	H2 MFC set to  0.000000
8/2/2010	2:21:59 PM	BCl3 MFC set to  0.000000
8/2/2010	2:21:59 PM	PHl3 MFC set to  0.000000
8/2/2010	2:21:59 PM	SiCl4 MFC set to  0.000000
8/2/2010	2:21:59 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	2:21:59 PM	Tube furnace set to 0
8/2/2010	2:22:26 PM	Helium valve closed
8/2/2010	2:22:26 PM	H2 valve closed
8/2/2010	2:22:26 PM	BCl3 valve closed
8/2/2010	2:22:26 PM	PH3 valve closed
8/2/2010	2:22:26 PM	SiCl4 pre valve closed
8/2/2010	2:22:26 PM	SiCl4 post valve closed
8/2/2010	2:22:26 PM	Bubbler valve closed
8/2/2010	2:22:26 PM	Main Vac valve opened
8/2/2010	2:22:26 PM	Bypass valve opened
8/2/2010	2:22:26 PM	Helium MFC set to  0.000000
8/2/2010	2:22:26 PM	H2 MFC set to  0.000000
8/2/2010	2:22:26 PM	BCl3 MFC set to  0.000000
8/2/2010	2:22:26 PM	PHl3 MFC set to  0.000000
8/2/2010	2:22:26 PM	SiCl4 MFC set to  0.000000
8/2/2010	2:22:26 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	2:22:27 PM	Tube furnace set to 0
8/2/2010	2:27:27 PM	H2 valve closed
8/2/2010	2:27:27 PM	BCl3 valve closed
8/2/2010	2:27:27 PM	PH3 valve closed
8/2/2010	2:27:27 PM	SiCl4 pre valve closed
8/2/2010	2:27:27 PM	SiCl4 post valve closed
8/2/2010	2:27:27 PM	Main Vac valve closed
8/2/2010	2:27:27 PM	Bypass valve closed
8/2/2010	2:27:27 PM	Bubbler valve closed
8/2/2010	2:27:27 PM	Helium valve opened
8/2/2010	2:27:27 PM	Helium MFC set to  500.000000
8/2/2010	2:27:27 PM	H2 MFC set to  0.000000
8/2/2010	2:27:27 PM	BCl3 MFC set to  0.000000
8/2/2010	2:27:27 PM	PHl3 MFC set to  0.000000
8/2/2010	2:27:27 PM	SiCl4 MFC set to  0.000000
8/2/2010	2:27:27 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	2:27:27 PM	Tube furnace set to 0
8/2/2010	2:28:48 PM	Helium valve closed
8/2/2010	2:28:48 PM	H2 valve closed
8/2/2010	2:28:48 PM	BCl3 valve closed
8/2/2010	2:28:48 PM	PH3 valve closed
8/2/2010	2:28:48 PM	SiCl4 pre valve closed
8/2/2010	2:28:48 PM	SiCl4 post valve closed
8/2/2010	2:28:48 PM	Main Vac valve closed
8/2/2010	2:28:48 PM	Bypass valve closed
8/2/2010	2:28:48 PM	Bubbler valve closed
8/2/2010	2:28:48 PM	Helium MFC set to  0.000000
8/2/2010	2:28:48 PM	H2 MFC set to  0.000000
8/2/2010	2:28:48 PM	BCl3 MFC set to  0.000000
8/2/2010	2:28:48 PM	PHl3 MFC set to  0.000000
8/2/2010	2:28:48 PM	SiCl4 MFC set to  0.000000
8/2/2010	2:28:48 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	2:28:48 PM	Tube furnace set to 0
8/2/2010	2:29:03 PM	Helium valve closed
8/2/2010	2:29:03 PM	H2 valve closed
8/2/2010	2:29:03 PM	BCl3 valve closed
8/2/2010	2:29:03 PM	PH3 valve closed
8/2/2010	2:29:03 PM	SiCl4 pre valve closed
8/2/2010	2:29:03 PM	SiCl4 post valve closed
8/2/2010	2:29:03 PM	Main Vac valve closed
8/2/2010	2:29:03 PM	Bubbler valve closed
8/2/2010	2:29:03 PM	Bypass valve opened
8/2/2010	2:29:03 PM	Helium MFC set to  0.000000
8/2/2010	2:29:03 PM	H2 MFC set to  0.000000
8/2/2010	2:29:03 PM	BCl3 MFC set to  0.000000
8/2/2010	2:29:03 PM	PHl3 MFC set to  0.000000
8/2/2010	2:29:03 PM	SiCl4 MFC set to  0.000000
8/2/2010	2:29:03 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	2:29:03 PM	Tube furnace set to 0
8/2/2010	2:29:30 PM	Helium valve closed
8/2/2010	2:29:30 PM	H2 valve closed
8/2/2010	2:29:30 PM	BCl3 valve closed
8/2/2010	2:29:30 PM	PH3 valve closed
8/2/2010	2:29:30 PM	SiCl4 pre valve closed
8/2/2010	2:29:30 PM	SiCl4 post valve closed
8/2/2010	2:29:30 PM	Bubbler valve closed
8/2/2010	2:29:30 PM	Main Vac valve opened
8/2/2010	2:29:30 PM	Bypass valve opened
8/2/2010	2:29:30 PM	Helium MFC set to  0.000000
8/2/2010	2:29:30 PM	H2 MFC set to  0.000000
8/2/2010	2:29:30 PM	BCl3 MFC set to  0.000000
8/2/2010	2:29:30 PM	PHl3 MFC set to  0.000000
8/2/2010	2:29:30 PM	SiCl4 MFC set to  0.000000
8/2/2010	2:29:30 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	2:29:31 PM	Tube furnace set to 0
8/2/2010	2:34:31 PM	H2 valve closed
8/2/2010	2:34:31 PM	BCl3 valve closed
8/2/2010	2:34:31 PM	PH3 valve closed
8/2/2010	2:34:31 PM	SiCl4 pre valve closed
8/2/2010	2:34:31 PM	SiCl4 post valve closed
8/2/2010	2:34:31 PM	Main Vac valve closed
8/2/2010	2:34:31 PM	Bypass valve closed
8/2/2010	2:34:31 PM	Bubbler valve closed
8/2/2010	2:34:31 PM	Helium valve opened
8/2/2010	2:34:31 PM	Helium MFC set to  500.000000
8/2/2010	2:34:31 PM	H2 MFC set to  0.000000
8/2/2010	2:34:31 PM	BCl3 MFC set to  0.000000
8/2/2010	2:34:31 PM	PHl3 MFC set to  0.000000
8/2/2010	2:34:31 PM	SiCl4 MFC set to  0.000000
8/2/2010	2:34:31 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	2:34:31 PM	Tube furnace set to 0
8/2/2010	2:35:52 PM	Helium valve closed
8/2/2010	2:35:52 PM	H2 valve closed
8/2/2010	2:35:52 PM	BCl3 valve closed
8/2/2010	2:35:52 PM	PH3 valve closed
8/2/2010	2:35:52 PM	SiCl4 pre valve closed
8/2/2010	2:35:52 PM	SiCl4 post valve closed
8/2/2010	2:35:52 PM	Main Vac valve closed
8/2/2010	2:35:52 PM	Bypass valve closed
8/2/2010	2:35:52 PM	Bubbler valve closed
8/2/2010	2:35:52 PM	Helium MFC set to  0.000000
8/2/2010	2:35:52 PM	H2 MFC set to  0.000000
8/2/2010	2:35:52 PM	BCl3 MFC set to  0.000000
8/2/2010	2:35:52 PM	PHl3 MFC set to  0.000000
8/2/2010	2:35:52 PM	SiCl4 MFC set to  0.000000
8/2/2010	2:35:52 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	2:35:52 PM	Tube furnace set to 0
8/2/2010	2:36:07 PM	Helium valve closed
8/2/2010	2:36:07 PM	H2 valve closed
8/2/2010	2:36:07 PM	BCl3 valve closed
8/2/2010	2:36:07 PM	PH3 valve closed
8/2/2010	2:36:07 PM	SiCl4 pre valve closed
8/2/2010	2:36:07 PM	SiCl4 post valve closed
8/2/2010	2:36:07 PM	Main Vac valve closed
8/2/2010	2:36:07 PM	Bubbler valve closed
8/2/2010	2:36:07 PM	Bypass valve opened
8/2/2010	2:36:07 PM	Helium MFC set to  0.000000
8/2/2010	2:36:07 PM	H2 MFC set to  0.000000
8/2/2010	2:36:07 PM	BCl3 MFC set to  0.000000
8/2/2010	2:36:07 PM	PHl3 MFC set to  0.000000
8/2/2010	2:36:07 PM	SiCl4 MFC set to  0.000000
8/2/2010	2:36:07 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	2:36:07 PM	Tube furnace set to 0
8/2/2010	2:36:34 PM	Helium valve closed
8/2/2010	2:36:34 PM	H2 valve closed
8/2/2010	2:36:34 PM	BCl3 valve closed
8/2/2010	2:36:34 PM	PH3 valve closed
8/2/2010	2:36:34 PM	SiCl4 pre valve closed
8/2/2010	2:36:34 PM	SiCl4 post valve closed
8/2/2010	2:36:34 PM	Bubbler valve closed
8/2/2010	2:36:34 PM	Main Vac valve opened
8/2/2010	2:36:34 PM	Bypass valve opened
8/2/2010	2:36:34 PM	Helium MFC set to  0.000000
8/2/2010	2:36:34 PM	H2 MFC set to  0.000000
8/2/2010	2:36:34 PM	BCl3 MFC set to  0.000000
8/2/2010	2:36:34 PM	PHl3 MFC set to  0.000000
8/2/2010	2:36:34 PM	SiCl4 MFC set to  0.000000
8/2/2010	2:36:34 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	2:36:35 PM	Tube furnace set to 0
8/2/2010	2:41:35 PM	Helium valve closed
8/2/2010	2:41:35 PM	H2 valve closed
8/2/2010	2:41:35 PM	BCl3 valve closed
8/2/2010	2:41:35 PM	PH3 valve closed
8/2/2010	2:41:35 PM	SiCl4 pre valve closed
8/2/2010	2:41:35 PM	SiCl4 post valve closed
8/2/2010	2:41:35 PM	Bubbler valve closed
8/2/2010	2:41:35 PM	Main Vac valve opened
8/2/2010	2:41:35 PM	Bypass valve opened
8/2/2010	2:41:35 PM	Helium MFC set to  0.000000
8/2/2010	2:41:35 PM	H2 MFC set to  0.000000
8/2/2010	2:41:35 PM	BCl3 MFC set to  0.000000
8/2/2010	2:41:35 PM	PHl3 MFC set to  0.000000
8/2/2010	2:41:35 PM	SiCl4 MFC set to  0.000000
8/2/2010	2:41:35 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	2:41:35 PM	Tube furnace set to 0
8/2/2010	2:41:36 PM	Run finished at 2:41 PM
8/2/2010	2:41:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
8/2/2010	2:55:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/2/2010	2:55:42 PM	Recipe started at 2:55 PM
8/2/2010	2:55:42 PM	Helium valve closed
8/2/2010	2:55:42 PM	H2 valve closed
8/2/2010	2:55:42 PM	BCl3 valve closed
8/2/2010	2:55:42 PM	PH3 valve closed
8/2/2010	2:55:42 PM	SiCl4 pre valve closed
8/2/2010	2:55:42 PM	SiCl4 post valve closed
8/2/2010	2:55:42 PM	Main Vac valve closed
8/2/2010	2:55:42 PM	Bubbler valve closed
8/2/2010	2:55:42 PM	Bypass valve opened
8/2/2010	2:55:42 PM	Helium MFC set to  0.000000
8/2/2010	2:55:42 PM	H2 MFC set to  0.000000
8/2/2010	2:55:42 PM	BCl3 MFC set to  0.000000
8/2/2010	2:55:42 PM	PHl3 MFC set to  0.000000
8/2/2010	2:55:42 PM	SiCl4 MFC set to  0.000000
8/2/2010	2:55:42 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	2:55:42 PM	Tube furnace set to 0
8/2/2010	2:55:42 PM	Helium valve closed
8/2/2010	2:55:42 PM	H2 valve closed
8/2/2010	2:55:42 PM	BCl3 valve closed
8/2/2010	2:55:42 PM	PH3 valve closed
8/2/2010	2:55:42 PM	SiCl4 pre valve closed
8/2/2010	2:55:42 PM	SiCl4 post valve closed
8/2/2010	2:55:42 PM	Bubbler valve closed
8/2/2010	2:55:42 PM	Main Vac valve opened
8/2/2010	2:55:42 PM	Bypass valve opened
8/2/2010	2:55:42 PM	Helium MFC set to  0.000000
8/2/2010	2:55:42 PM	H2 MFC set to  0.000000
8/2/2010	2:55:42 PM	BCl3 MFC set to  0.000000
8/2/2010	2:55:42 PM	PHl3 MFC set to  0.000000
8/2/2010	2:55:42 PM	SiCl4 MFC set to  0.000000
8/2/2010	2:55:42 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	2:55:42 PM	Tube furnace set to 0
8/2/2010	2:56:42 PM	H2 valve closed
8/2/2010	2:56:42 PM	BCl3 valve closed
8/2/2010	2:56:42 PM	PH3 valve closed
8/2/2010	2:56:42 PM	SiCl4 pre valve closed
8/2/2010	2:56:42 PM	SiCl4 post valve closed
8/2/2010	2:56:42 PM	Bubbler valve closed
8/2/2010	2:56:42 PM	Helium valve opened
8/2/2010	2:56:42 PM	Main Vac valve opened
8/2/2010	2:56:42 PM	Bypass valve opened
8/2/2010	2:56:42 PM	Helium MFC set to  100.000000
8/2/2010	2:56:42 PM	H2 MFC set to  0.000000
8/2/2010	2:56:42 PM	BCl3 MFC set to  0.000000
8/2/2010	2:56:42 PM	PHl3 MFC set to  0.000000
8/2/2010	2:56:42 PM	SiCl4 MFC set to  0.000000
8/2/2010	2:56:42 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	2:56:42 PM	Tube furnace set to 0
8/2/2010	3:05:42 PM	Helium valve closed
8/2/2010	3:05:42 PM	H2 valve closed
8/2/2010	3:05:42 PM	BCl3 valve closed
8/2/2010	3:05:42 PM	PH3 valve closed
8/2/2010	3:05:42 PM	SiCl4 pre valve closed
8/2/2010	3:05:42 PM	SiCl4 post valve closed
8/2/2010	3:05:42 PM	Bubbler valve closed
8/2/2010	3:05:43 PM	Main Vac valve opened
8/2/2010	3:05:43 PM	Bypass valve opened
8/2/2010	3:05:43 PM	Helium MFC set to  0.000000
8/2/2010	3:05:43 PM	H2 MFC set to  0.000000
8/2/2010	3:05:43 PM	BCl3 MFC set to  0.000000
8/2/2010	3:05:43 PM	PHl3 MFC set to  0.000000
8/2/2010	3:05:43 PM	SiCl4 MFC set to  0.000000
8/2/2010	3:05:43 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	3:05:43 PM	Tube furnace set to 0
8/2/2010	3:06:43 PM	H2 valve closed
8/2/2010	3:06:43 PM	BCl3 valve closed
8/2/2010	3:06:43 PM	PH3 valve closed
8/2/2010	3:06:43 PM	SiCl4 pre valve closed
8/2/2010	3:06:43 PM	SiCl4 post valve closed
8/2/2010	3:06:43 PM	Bubbler valve closed
8/2/2010	3:06:43 PM	Helium valve opened
8/2/2010	3:06:43 PM	Main Vac valve opened
8/2/2010	3:06:43 PM	Bypass valve opened
8/2/2010	3:06:43 PM	Helium MFC set to  100.000000
8/2/2010	3:06:43 PM	H2 MFC set to  0.000000
8/2/2010	3:06:43 PM	BCl3 MFC set to  0.000000
8/2/2010	3:06:43 PM	PHl3 MFC set to  0.000000
8/2/2010	3:06:43 PM	SiCl4 MFC set to  0.000000
8/2/2010	3:06:43 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	3:06:43 PM	Tube furnace set to 0
8/2/2010	3:15:43 PM	Helium valve closed
8/2/2010	3:15:43 PM	H2 valve closed
8/2/2010	3:15:43 PM	BCl3 valve closed
8/2/2010	3:15:43 PM	PH3 valve closed
8/2/2010	3:15:43 PM	SiCl4 pre valve closed
8/2/2010	3:15:43 PM	SiCl4 post valve closed
8/2/2010	3:15:43 PM	Bubbler valve closed
8/2/2010	3:15:43 PM	Main Vac valve opened
8/2/2010	3:15:43 PM	Bypass valve opened
8/2/2010	3:15:43 PM	Helium MFC set to  0.000000
8/2/2010	3:15:43 PM	H2 MFC set to  0.000000
8/2/2010	3:15:43 PM	BCl3 MFC set to  0.000000
8/2/2010	3:15:43 PM	PHl3 MFC set to  0.000000
8/2/2010	3:15:43 PM	SiCl4 MFC set to  0.000000
8/2/2010	3:15:43 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	3:15:43 PM	Tube furnace set to 0
8/2/2010	3:16:43 PM	H2 valve closed
8/2/2010	3:16:43 PM	BCl3 valve closed
8/2/2010	3:16:43 PM	PH3 valve closed
8/2/2010	3:16:43 PM	SiCl4 pre valve closed
8/2/2010	3:16:43 PM	SiCl4 post valve closed
8/2/2010	3:16:43 PM	Bubbler valve closed
8/2/2010	3:16:43 PM	Helium valve opened
8/2/2010	3:16:43 PM	Main Vac valve opened
8/2/2010	3:16:43 PM	Bypass valve opened
8/2/2010	3:16:43 PM	Helium MFC set to  100.000000
8/2/2010	3:16:43 PM	H2 MFC set to  0.000000
8/2/2010	3:16:43 PM	BCl3 MFC set to  0.000000
8/2/2010	3:16:43 PM	PHl3 MFC set to  0.000000
8/2/2010	3:16:43 PM	SiCl4 MFC set to  0.000000
8/2/2010	3:16:43 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	3:16:43 PM	Tube furnace set to 0
8/2/2010	3:25:43 PM	Helium valve closed
8/2/2010	3:25:43 PM	H2 valve closed
8/2/2010	3:25:43 PM	BCl3 valve closed
8/2/2010	3:25:43 PM	PH3 valve closed
8/2/2010	3:25:43 PM	SiCl4 pre valve closed
8/2/2010	3:25:43 PM	SiCl4 post valve closed
8/2/2010	3:25:43 PM	Bubbler valve closed
8/2/2010	3:25:43 PM	Main Vac valve opened
8/2/2010	3:25:43 PM	Bypass valve opened
8/2/2010	3:25:43 PM	Helium MFC set to  0.000000
8/2/2010	3:25:43 PM	H2 MFC set to  0.000000
8/2/2010	3:25:43 PM	BCl3 MFC set to  0.000000
8/2/2010	3:25:43 PM	PHl3 MFC set to  0.000000
8/2/2010	3:25:43 PM	SiCl4 MFC set to  0.000000
8/2/2010	3:25:43 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	3:25:43 PM	Tube furnace set to 0
8/2/2010	3:25:44 PM	Run finished at 3:25 PM
8/2/2010	3:25:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/2/2010	3:48:01 PM	Recipe started at 3:48 PM
8/2/2010	3:48:01 PM	Helium valve closed
8/2/2010	3:48:01 PM	BCl3 valve closed
8/2/2010	3:48:01 PM	PH3 valve closed
8/2/2010	3:48:01 PM	SiCl4 pre valve closed
8/2/2010	3:48:01 PM	SiCl4 post valve closed
8/2/2010	3:48:01 PM	Main Vac valve closed
8/2/2010	3:48:01 PM	Bypass valve closed
8/2/2010	3:48:01 PM	Bubbler valve closed
8/2/2010	3:48:01 PM	H2 valve opened
8/2/2010	3:48:01 PM	Helium MFC set to  0.000000
8/2/2010	3:48:01 PM	H2 MFC set to  500.000000
8/2/2010	3:48:01 PM	BCl3 MFC set to  0.000000
8/2/2010	3:48:01 PM	PHl3 MFC set to  0.000000
8/2/2010	3:48:01 PM	SiCl4 MFC set to  0.000000
8/2/2010	3:48:01 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	3:48:01 PM	Tube furnace set to 0
8/2/2010	3:49:23 PM	Helium valve closed
8/2/2010	3:49:23 PM	BCl3 valve closed
8/2/2010	3:49:23 PM	PH3 valve closed
8/2/2010	3:49:23 PM	SiCl4 pre valve closed
8/2/2010	3:49:23 PM	SiCl4 post valve closed
8/2/2010	3:49:23 PM	Main Vac valve closed
8/2/2010	3:49:23 PM	Bypass valve closed
8/2/2010	3:49:23 PM	H2 valve opened
8/2/2010	3:49:23 PM	Bubbler valve opened
8/2/2010	3:49:23 PM	Helium MFC set to  0.000000
8/2/2010	3:49:23 PM	H2 MFC set to  500.000000
8/2/2010	3:49:23 PM	BCl3 MFC set to  0.000000
8/2/2010	3:49:23 PM	PHl3 MFC set to  0.000000
8/2/2010	3:49:23 PM	SiCl4 MFC set to  0.000000
8/2/2010	3:49:23 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	3:49:23 PM	Tube furnace set to 1000
8/2/2010	4:09:23 PM	Helium valve closed
8/2/2010	4:09:23 PM	BCl3 valve closed
8/2/2010	4:09:23 PM	SiCl4 pre valve closed
8/2/2010	4:09:23 PM	SiCl4 post valve closed
8/2/2010	4:09:23 PM	Main Vac valve closed
8/2/2010	4:09:23 PM	Bypass valve closed
8/2/2010	4:09:23 PM	H2 valve opened
8/2/2010	4:09:23 PM	PH3 valve opened
8/2/2010	4:09:23 PM	Bubbler valve opened
8/2/2010	4:09:23 PM	Helium MFC set to  0.000000
8/2/2010	4:09:23 PM	H2 MFC set to  500.000000
8/2/2010	4:09:23 PM	BCl3 MFC set to  0.000000
8/2/2010	4:09:23 PM	PHl3 MFC set to  1.000000
8/2/2010	4:09:23 PM	SiCl4 MFC set to  0.000000
8/2/2010	4:09:23 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	4:09:23 PM	Tube furnace set to 1000
8/2/2010	4:29:23 PM	H2 valve closed
8/2/2010	4:29:23 PM	BCl3 valve closed
8/2/2010	4:29:23 PM	PH3 valve closed
8/2/2010	4:29:23 PM	SiCl4 pre valve closed
8/2/2010	4:29:23 PM	SiCl4 post valve closed
8/2/2010	4:29:23 PM	Main Vac valve closed
8/2/2010	4:29:23 PM	Bypass valve closed
8/2/2010	4:29:23 PM	Helium valve opened
8/2/2010	4:29:23 PM	Bubbler valve opened
8/2/2010	4:29:23 PM	Helium MFC set to  500.000000
8/2/2010	4:29:23 PM	H2 MFC set to  0.000000
8/2/2010	4:29:23 PM	BCl3 MFC set to  0.000000
8/2/2010	4:29:23 PM	PHl3 MFC set to  0.000000
8/2/2010	4:29:23 PM	SiCl4 MFC set to  0.000000
8/2/2010	4:29:23 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	4:29:23 PM	Tube furnace set to 0
8/2/2010	4:49:23 PM	Helium valve closed
8/2/2010	4:49:23 PM	H2 valve closed
8/2/2010	4:49:23 PM	BCl3 valve closed
8/2/2010	4:49:23 PM	PH3 valve closed
8/2/2010	4:49:23 PM	SiCl4 pre valve closed
8/2/2010	4:49:23 PM	SiCl4 post valve closed
8/2/2010	4:49:23 PM	Main Vac valve closed
8/2/2010	4:49:23 PM	Bypass valve closed
8/2/2010	4:49:23 PM	Bubbler valve closed
8/2/2010	4:49:23 PM	Helium MFC set to  0.000000
8/2/2010	4:49:23 PM	H2 MFC set to  0.000000
8/2/2010	4:49:23 PM	BCl3 MFC set to  0.000000
8/2/2010	4:49:23 PM	PHl3 MFC set to  0.000000
8/2/2010	4:49:23 PM	SiCl4 MFC set to  0.000000
8/2/2010	4:49:23 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	4:49:23 PM	Tube furnace set to 0
8/2/2010	4:49:24 PM	Run finished at 4:49 PM
8/2/2010	4:58:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/2/2010	4:58:52 PM	Recipe started at 4:58 PM
8/2/2010	4:58:52 PM	Helium valve closed
8/2/2010	4:58:52 PM	H2 valve closed
8/2/2010	4:58:52 PM	BCl3 valve closed
8/2/2010	4:58:52 PM	PH3 valve closed
8/2/2010	4:58:52 PM	SiCl4 pre valve closed
8/2/2010	4:58:52 PM	SiCl4 post valve closed
8/2/2010	4:58:52 PM	Main Vac valve closed
8/2/2010	4:58:52 PM	Bubbler valve closed
8/2/2010	4:58:52 PM	Bypass valve opened
8/2/2010	4:58:52 PM	Helium MFC set to  0.000000
8/2/2010	4:58:52 PM	H2 MFC set to  0.000000
8/2/2010	4:58:52 PM	BCl3 MFC set to  0.000000
8/2/2010	4:58:52 PM	PHl3 MFC set to  0.000000
8/2/2010	4:58:52 PM	SiCl4 MFC set to  0.000000
8/2/2010	4:58:52 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	4:58:52 PM	Tube furnace set to 0
8/2/2010	4:59:28 PM	Helium valve closed
8/2/2010	4:59:28 PM	H2 valve closed
8/2/2010	4:59:28 PM	BCl3 valve closed
8/2/2010	4:59:28 PM	PH3 valve closed
8/2/2010	4:59:28 PM	SiCl4 pre valve closed
8/2/2010	4:59:28 PM	SiCl4 post valve closed
8/2/2010	4:59:28 PM	Bubbler valve closed
8/2/2010	4:59:28 PM	Main Vac valve opened
8/2/2010	4:59:28 PM	Bypass valve opened
8/2/2010	4:59:28 PM	Helium MFC set to  0.000000
8/2/2010	4:59:28 PM	H2 MFC set to  0.000000
8/2/2010	4:59:28 PM	BCl3 MFC set to  0.000000
8/2/2010	4:59:28 PM	PHl3 MFC set to  0.000000
8/2/2010	4:59:28 PM	SiCl4 MFC set to  0.000000
8/2/2010	4:59:28 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	4:59:28 PM	Tube furnace set to 0
8/2/2010	4:59:28 PM	Run finished at 4:59 PM
8/2/2010	4:59:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/2/2010	7:15:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/2/2010	7:15:56 PM	Recipe started at 7:15 PM
8/2/2010	7:15:56 PM	H2 valve closed
8/2/2010	7:15:56 PM	BCl3 valve closed
8/2/2010	7:15:56 PM	PH3 valve closed
8/2/2010	7:15:56 PM	SiCl4 pre valve closed
8/2/2010	7:15:56 PM	SiCl4 post valve closed
8/2/2010	7:15:56 PM	Main Vac valve closed
8/2/2010	7:15:56 PM	Bypass valve closed
8/2/2010	7:15:56 PM	Bubbler valve closed
8/2/2010	7:15:56 PM	Helium valve opened
8/2/2010	7:15:56 PM	Helium MFC set to  500.000000
8/2/2010	7:15:56 PM	H2 MFC set to  0.000000
8/2/2010	7:15:56 PM	BCl3 MFC set to  0.000000
8/2/2010	7:15:56 PM	PHl3 MFC set to  0.000000
8/2/2010	7:15:56 PM	SiCl4 MFC set to  0.000000
8/2/2010	7:15:56 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	7:15:56 PM	Tube furnace set to 0
8/2/2010	7:17:15 PM	Helium valve closed
8/2/2010	7:17:15 PM	H2 valve closed
8/2/2010	7:17:15 PM	BCl3 valve closed
8/2/2010	7:17:15 PM	PH3 valve closed
8/2/2010	7:17:15 PM	SiCl4 pre valve closed
8/2/2010	7:17:15 PM	SiCl4 post valve closed
8/2/2010	7:17:15 PM	Main Vac valve closed
8/2/2010	7:17:15 PM	Bypass valve closed
8/2/2010	7:17:15 PM	Bubbler valve closed
8/2/2010	7:17:15 PM	Helium MFC set to  0.000000
8/2/2010	7:17:15 PM	H2 MFC set to  0.000000
8/2/2010	7:17:15 PM	BCl3 MFC set to  0.000000
8/2/2010	7:17:15 PM	PHl3 MFC set to  0.000000
8/2/2010	7:17:15 PM	SiCl4 MFC set to  0.000000
8/2/2010	7:17:15 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	7:17:16 PM	Tube furnace set to 0
8/2/2010	7:17:16 PM	Run finished at 7:17 PM
8/2/2010	7:17:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/2/2010	7:28:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/2/2010	7:28:55 PM	Recipe started at 7:28 PM
8/2/2010	7:28:55 PM	Helium valve closed
8/2/2010	7:28:55 PM	H2 valve closed
8/2/2010	7:28:55 PM	BCl3 valve closed
8/2/2010	7:28:55 PM	PH3 valve closed
8/2/2010	7:28:55 PM	SiCl4 pre valve closed
8/2/2010	7:28:55 PM	SiCl4 post valve closed
8/2/2010	7:28:55 PM	Main Vac valve closed
8/2/2010	7:28:55 PM	Bubbler valve closed
8/2/2010	7:28:55 PM	Bypass valve opened
8/2/2010	7:28:55 PM	Helium MFC set to  0.000000
8/2/2010	7:28:55 PM	H2 MFC set to  0.000000
8/2/2010	7:28:55 PM	BCl3 MFC set to  0.000000
8/2/2010	7:28:55 PM	PHl3 MFC set to  0.000000
8/2/2010	7:28:55 PM	SiCl4 MFC set to  0.000000
8/2/2010	7:28:55 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	7:28:55 PM	Tube furnace set to 0
8/2/2010	7:29:31 PM	Helium valve closed
8/2/2010	7:29:31 PM	H2 valve closed
8/2/2010	7:29:31 PM	BCl3 valve closed
8/2/2010	7:29:31 PM	PH3 valve closed
8/2/2010	7:29:31 PM	SiCl4 pre valve closed
8/2/2010	7:29:31 PM	SiCl4 post valve closed
8/2/2010	7:29:31 PM	Bubbler valve closed
8/2/2010	7:29:31 PM	Main Vac valve opened
8/2/2010	7:29:31 PM	Bypass valve opened
8/2/2010	7:29:31 PM	Helium MFC set to  0.000000
8/2/2010	7:29:31 PM	H2 MFC set to  0.000000
8/2/2010	7:29:31 PM	BCl3 MFC set to  0.000000
8/2/2010	7:29:31 PM	PHl3 MFC set to  0.000000
8/2/2010	7:29:31 PM	SiCl4 MFC set to  0.000000
8/2/2010	7:29:31 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	7:29:31 PM	Tube furnace set to 0
8/2/2010	7:29:32 PM	Run finished at 7:29 PM
8/2/2010	7:29:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/2/2010	7:30:50 PM	Recipe started at 7:30 PM
8/2/2010	7:30:50 PM	Helium valve closed
8/2/2010	7:30:50 PM	H2 valve closed
8/2/2010	7:30:50 PM	BCl3 valve closed
8/2/2010	7:30:50 PM	PH3 valve closed
8/2/2010	7:30:50 PM	SiCl4 pre valve closed
8/2/2010	7:30:50 PM	SiCl4 post valve closed
8/2/2010	7:30:50 PM	Main Vac valve closed
8/2/2010	7:30:50 PM	Bubbler valve closed
8/2/2010	7:30:50 PM	Bypass valve opened
8/2/2010	7:30:50 PM	Helium MFC set to  0.000000
8/2/2010	7:30:50 PM	H2 MFC set to  0.000000
8/2/2010	7:30:50 PM	BCl3 MFC set to  0.000000
8/2/2010	7:30:50 PM	PHl3 MFC set to  0.000000
8/2/2010	7:30:50 PM	SiCl4 MFC set to  0.000000
8/2/2010	7:30:50 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	7:30:50 PM	Tube furnace set to 100
8/2/2010	7:30:51 PM	Helium valve closed
8/2/2010	7:30:51 PM	H2 valve closed
8/2/2010	7:30:51 PM	BCl3 valve closed
8/2/2010	7:30:51 PM	PH3 valve closed
8/2/2010	7:30:51 PM	SiCl4 pre valve closed
8/2/2010	7:30:51 PM	SiCl4 post valve closed
8/2/2010	7:30:51 PM	Bubbler valve closed
8/2/2010	7:30:51 PM	Main Vac valve opened
8/2/2010	7:30:51 PM	Bypass valve opened
8/2/2010	7:30:51 PM	Helium MFC set to  0.000000
8/2/2010	7:30:51 PM	H2 MFC set to  0.000000
8/2/2010	7:30:51 PM	BCl3 MFC set to  0.000000
8/2/2010	7:30:51 PM	PHl3 MFC set to  0.000000
8/2/2010	7:30:51 PM	SiCl4 MFC set to  0.000000
8/2/2010	7:30:51 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	7:30:51 PM	Tube furnace set to 100
8/2/2010	7:31:51 PM	H2 valve closed
8/2/2010	7:31:51 PM	BCl3 valve closed
8/2/2010	7:31:51 PM	PH3 valve closed
8/2/2010	7:31:51 PM	SiCl4 pre valve closed
8/2/2010	7:31:51 PM	SiCl4 post valve closed
8/2/2010	7:31:51 PM	Bubbler valve closed
8/2/2010	7:31:51 PM	Helium valve opened
8/2/2010	7:31:51 PM	Main Vac valve opened
8/2/2010	7:31:51 PM	Bypass valve opened
8/2/2010	7:31:51 PM	Helium MFC set to  100.000000
8/2/2010	7:31:51 PM	H2 MFC set to  0.000000
8/2/2010	7:31:51 PM	BCl3 MFC set to  0.000000
8/2/2010	7:31:51 PM	PHl3 MFC set to  0.000000
8/2/2010	7:31:51 PM	SiCl4 MFC set to  0.000000
8/2/2010	7:31:51 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	7:31:51 PM	Tube furnace set to 100
8/2/2010	7:40:51 PM	Helium valve closed
8/2/2010	7:40:51 PM	H2 valve closed
8/2/2010	7:40:51 PM	BCl3 valve closed
8/2/2010	7:40:51 PM	PH3 valve closed
8/2/2010	7:40:51 PM	SiCl4 pre valve closed
8/2/2010	7:40:51 PM	SiCl4 post valve closed
8/2/2010	7:40:51 PM	Bubbler valve closed
8/2/2010	7:40:51 PM	Main Vac valve opened
8/2/2010	7:40:51 PM	Bypass valve opened
8/2/2010	7:40:51 PM	Helium MFC set to  0.000000
8/2/2010	7:40:51 PM	H2 MFC set to  0.000000
8/2/2010	7:40:51 PM	BCl3 MFC set to  0.000000
8/2/2010	7:40:51 PM	PHl3 MFC set to  0.000000
8/2/2010	7:40:51 PM	SiCl4 MFC set to  0.000000
8/2/2010	7:40:51 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	7:40:51 PM	Tube furnace set to 100
8/2/2010	7:41:51 PM	H2 valve closed
8/2/2010	7:41:51 PM	BCl3 valve closed
8/2/2010	7:41:51 PM	PH3 valve closed
8/2/2010	7:41:51 PM	SiCl4 pre valve closed
8/2/2010	7:41:51 PM	SiCl4 post valve closed
8/2/2010	7:41:51 PM	Bubbler valve closed
8/2/2010	7:41:51 PM	Helium valve opened
8/2/2010	7:41:51 PM	Main Vac valve opened
8/2/2010	7:41:51 PM	Bypass valve opened
8/2/2010	7:41:51 PM	Helium MFC set to  100.000000
8/2/2010	7:41:51 PM	H2 MFC set to  0.000000
8/2/2010	7:41:51 PM	BCl3 MFC set to  0.000000
8/2/2010	7:41:51 PM	PHl3 MFC set to  0.000000
8/2/2010	7:41:51 PM	SiCl4 MFC set to  0.000000
8/2/2010	7:41:51 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	7:41:51 PM	Tube furnace set to 100
8/2/2010	7:50:51 PM	Helium valve closed
8/2/2010	7:50:51 PM	H2 valve closed
8/2/2010	7:50:51 PM	BCl3 valve closed
8/2/2010	7:50:51 PM	PH3 valve closed
8/2/2010	7:50:51 PM	SiCl4 pre valve closed
8/2/2010	7:50:51 PM	SiCl4 post valve closed
8/2/2010	7:50:51 PM	Bubbler valve closed
8/2/2010	7:50:51 PM	Main Vac valve opened
8/2/2010	7:50:51 PM	Bypass valve opened
8/2/2010	7:50:51 PM	Helium MFC set to  0.000000
8/2/2010	7:50:51 PM	H2 MFC set to  0.000000
8/2/2010	7:50:51 PM	BCl3 MFC set to  0.000000
8/2/2010	7:50:51 PM	PHl3 MFC set to  0.000000
8/2/2010	7:50:51 PM	SiCl4 MFC set to  0.000000
8/2/2010	7:50:51 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	7:50:52 PM	Tube furnace set to 100
8/2/2010	7:51:52 PM	H2 valve closed
8/2/2010	7:51:52 PM	BCl3 valve closed
8/2/2010	7:51:52 PM	PH3 valve closed
8/2/2010	7:51:52 PM	SiCl4 pre valve closed
8/2/2010	7:51:52 PM	SiCl4 post valve closed
8/2/2010	7:51:52 PM	Bubbler valve closed
8/2/2010	7:51:52 PM	Helium valve opened
8/2/2010	7:51:52 PM	Main Vac valve opened
8/2/2010	7:51:52 PM	Bypass valve opened
8/2/2010	7:51:52 PM	Helium MFC set to  100.000000
8/2/2010	7:51:52 PM	H2 MFC set to  0.000000
8/2/2010	7:51:52 PM	BCl3 MFC set to  0.000000
8/2/2010	7:51:52 PM	PHl3 MFC set to  0.000000
8/2/2010	7:51:52 PM	SiCl4 MFC set to  0.000000
8/2/2010	7:51:52 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	7:51:52 PM	Tube furnace set to 100
8/2/2010	8:00:52 PM	Helium valve closed
8/2/2010	8:00:52 PM	H2 valve closed
8/2/2010	8:00:52 PM	BCl3 valve closed
8/2/2010	8:00:52 PM	PH3 valve closed
8/2/2010	8:00:52 PM	SiCl4 pre valve closed
8/2/2010	8:00:52 PM	SiCl4 post valve closed
8/2/2010	8:00:52 PM	Bubbler valve closed
8/2/2010	8:00:52 PM	Main Vac valve opened
8/2/2010	8:00:52 PM	Bypass valve opened
8/2/2010	8:00:52 PM	Helium MFC set to  0.000000
8/2/2010	8:00:52 PM	H2 MFC set to  0.000000
8/2/2010	8:00:52 PM	BCl3 MFC set to  0.000000
8/2/2010	8:00:52 PM	PHl3 MFC set to  0.000000
8/2/2010	8:00:52 PM	SiCl4 MFC set to  0.000000
8/2/2010	8:00:52 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	8:00:52 PM	Tube furnace set to 100
8/2/2010	8:00:53 PM	Run finished at 8:00 PM
8/2/2010	8:01:42 PM	Helium valve opened
8/2/2010	8:01:46 PM	Helium MFC set to  100.000000
8/2/2010	8:04:00 PM	Helium valve closed
8/2/2010	8:04:49 PM	Helium valve opened
8/2/2010	8:24:17 PM	Helium valve closed
8/2/2010	8:25:13 PM	Helium valve opened
8/2/2010	8:36:48 PM	Helium valve closed
8/2/2010	8:37:25 PM	Bypass valve closed
8/2/2010	8:37:25 PM	Main Vac valve closed
8/2/2010	8:37:31 PM	Bypass valve opened
8/2/2010	8:37:32 PM	Main Vac valve opened
8/2/2010	8:38:18 PM	Recipe started at 8:38 PM
8/2/2010	8:38:18 PM	Helium valve closed
8/2/2010	8:38:18 PM	BCl3 valve closed
8/2/2010	8:38:18 PM	PH3 valve closed
8/2/2010	8:38:18 PM	SiCl4 pre valve closed
8/2/2010	8:38:18 PM	SiCl4 post valve closed
8/2/2010	8:38:18 PM	Main Vac valve closed
8/2/2010	8:38:18 PM	Bypass valve closed
8/2/2010	8:38:18 PM	Bubbler valve closed
8/2/2010	8:38:18 PM	H2 valve opened
8/2/2010	8:38:18 PM	Helium MFC set to  0.000000
8/2/2010	8:38:18 PM	H2 MFC set to  500.000000
8/2/2010	8:38:18 PM	BCl3 MFC set to  0.000000
8/2/2010	8:38:18 PM	PHl3 MFC set to  0.000000
8/2/2010	8:38:18 PM	SiCl4 MFC set to  0.000000
8/2/2010	8:38:18 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	8:38:18 PM	Tube furnace set to 0
8/2/2010	8:39:38 PM	Helium valve closed
8/2/2010	8:39:38 PM	BCl3 valve closed
8/2/2010	8:39:38 PM	PH3 valve closed
8/2/2010	8:39:38 PM	SiCl4 pre valve closed
8/2/2010	8:39:38 PM	SiCl4 post valve closed
8/2/2010	8:39:38 PM	Main Vac valve closed
8/2/2010	8:39:38 PM	Bypass valve closed
8/2/2010	8:39:38 PM	H2 valve opened
8/2/2010	8:39:38 PM	Bubbler valve opened
8/2/2010	8:39:38 PM	Helium MFC set to  0.000000
8/2/2010	8:39:38 PM	H2 MFC set to  500.000000
8/2/2010	8:39:38 PM	BCl3 MFC set to  0.000000
8/2/2010	8:39:38 PM	PHl3 MFC set to  0.000000
8/2/2010	8:39:38 PM	SiCl4 MFC set to  0.000000
8/2/2010	8:39:38 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	8:39:38 PM	Tube furnace set to 1000
8/2/2010	8:59:38 PM	Helium valve closed
8/2/2010	8:59:38 PM	BCl3 valve closed
8/2/2010	8:59:38 PM	PH3 valve closed
8/2/2010	8:59:38 PM	Main Vac valve closed
8/2/2010	8:59:38 PM	Bypass valve closed
8/2/2010	8:59:38 PM	H2 valve opened
8/2/2010	8:59:38 PM	SiCl4 pre valve opened
8/2/2010	8:59:38 PM	SiCl4 post valve opened
8/2/2010	8:59:38 PM	Bubbler valve opened
8/2/2010	8:59:38 PM	Helium MFC set to  0.000000
8/2/2010	8:59:38 PM	H2 MFC set to  500.000000
8/2/2010	8:59:38 PM	BCl3 MFC set to  0.000000
8/2/2010	8:59:38 PM	PHl3 MFC set to  0.000000
8/2/2010	8:59:38 PM	SiCl4 MFC set to  50.000000
8/2/2010	8:59:38 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	8:59:38 PM	Tube furnace set to 1000
8/2/2010	9:19:38 PM	H2 valve closed
8/2/2010	9:19:38 PM	BCl3 valve closed
8/2/2010	9:19:38 PM	PH3 valve closed
8/2/2010	9:19:38 PM	SiCl4 pre valve closed
8/2/2010	9:19:38 PM	SiCl4 post valve closed
8/2/2010	9:19:38 PM	Main Vac valve closed
8/2/2010	9:19:38 PM	Bypass valve closed
8/2/2010	9:19:38 PM	Helium valve opened
8/2/2010	9:19:38 PM	Bubbler valve opened
8/2/2010	9:19:38 PM	Helium MFC set to  500.000000
8/2/2010	9:19:38 PM	H2 MFC set to  0.000000
8/2/2010	9:19:38 PM	BCl3 MFC set to  0.000000
8/2/2010	9:19:38 PM	PHl3 MFC set to  0.000000
8/2/2010	9:19:38 PM	SiCl4 MFC set to  0.000000
8/2/2010	9:19:38 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	9:19:38 PM	Tube furnace set to 750
8/2/2010	9:39:38 PM	H2 valve closed
8/2/2010	9:39:38 PM	BCl3 valve closed
8/2/2010	9:39:38 PM	PH3 valve closed
8/2/2010	9:39:38 PM	SiCl4 pre valve closed
8/2/2010	9:39:38 PM	SiCl4 post valve closed
8/2/2010	9:39:38 PM	Main Vac valve closed
8/2/2010	9:39:38 PM	Bypass valve closed
8/2/2010	9:39:38 PM	Helium valve opened
8/2/2010	9:39:38 PM	Bubbler valve opened
8/2/2010	9:39:38 PM	Helium MFC set to  500.000000
8/2/2010	9:39:38 PM	H2 MFC set to  0.000000
8/2/2010	9:39:38 PM	BCl3 MFC set to  0.000000
8/2/2010	9:39:38 PM	PHl3 MFC set to  0.000000
8/2/2010	9:39:38 PM	SiCl4 MFC set to  0.000000
8/2/2010	9:39:38 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	9:39:38 PM	Tube furnace set to 0
8/2/2010	9:59:38 PM	Helium valve closed
8/2/2010	9:59:38 PM	H2 valve closed
8/2/2010	9:59:38 PM	BCl3 valve closed
8/2/2010	9:59:38 PM	PH3 valve closed
8/2/2010	9:59:38 PM	SiCl4 pre valve closed
8/2/2010	9:59:38 PM	SiCl4 post valve closed
8/2/2010	9:59:38 PM	Main Vac valve closed
8/2/2010	9:59:38 PM	Bypass valve closed
8/2/2010	9:59:38 PM	Bubbler valve closed
8/2/2010	9:59:38 PM	Helium MFC set to  0.000000
8/2/2010	9:59:38 PM	H2 MFC set to  0.000000
8/2/2010	9:59:38 PM	BCl3 MFC set to  0.000000
8/2/2010	9:59:38 PM	PHl3 MFC set to  0.000000
8/2/2010	9:59:38 PM	SiCl4 MFC set to  0.000000
8/2/2010	9:59:38 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	9:59:38 PM	Tube furnace set to 0
8/2/2010	9:59:39 PM	Run finished at 9:59 PM
8/2/2010	10:20:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/2/2010	10:21:00 PM	Recipe started at 10:20 PM
8/2/2010	10:21:00 PM	H2 valve closed
8/2/2010	10:21:00 PM	BCl3 valve closed
8/2/2010	10:21:00 PM	PH3 valve closed
8/2/2010	10:21:00 PM	SiCl4 pre valve closed
8/2/2010	10:21:00 PM	SiCl4 post valve closed
8/2/2010	10:21:00 PM	Main Vac valve closed
8/2/2010	10:21:00 PM	Bypass valve closed
8/2/2010	10:21:00 PM	Bubbler valve closed
8/2/2010	10:21:00 PM	Helium valve opened
8/2/2010	10:21:00 PM	Helium MFC set to  500.000000
8/2/2010	10:21:00 PM	H2 MFC set to  0.000000
8/2/2010	10:21:00 PM	BCl3 MFC set to  0.000000
8/2/2010	10:21:00 PM	PHl3 MFC set to  0.000000
8/2/2010	10:21:00 PM	SiCl4 MFC set to  0.000000
8/2/2010	10:21:00 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	10:21:00 PM	Tube furnace set to 0
8/2/2010	10:21:02 PM	Helium valve closed
8/2/2010	10:21:02 PM	H2 valve closed
8/2/2010	10:21:02 PM	BCl3 valve closed
8/2/2010	10:21:02 PM	PH3 valve closed
8/2/2010	10:21:02 PM	SiCl4 pre valve closed
8/2/2010	10:21:02 PM	SiCl4 post valve closed
8/2/2010	10:21:02 PM	Main Vac valve closed
8/2/2010	10:21:02 PM	Bypass valve closed
8/2/2010	10:21:02 PM	Bubbler valve closed
8/2/2010	10:21:02 PM	Helium MFC set to  0.000000
8/2/2010	10:21:02 PM	H2 MFC set to  0.000000
8/2/2010	10:21:02 PM	BCl3 MFC set to  0.000000
8/2/2010	10:21:02 PM	PHl3 MFC set to  0.000000
8/2/2010	10:21:02 PM	SiCl4 MFC set to  0.000000
8/2/2010	10:21:02 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	10:21:02 PM	Tube furnace set to 0
8/2/2010	10:21:02 PM	Run finished at 10:21 PM
8/2/2010	10:21:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/2/2010	10:40:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/2/2010	10:40:00 PM	Recipe started at 10:40 PM
8/2/2010	10:40:00 PM	Helium valve closed
8/2/2010	10:40:00 PM	H2 valve closed
8/2/2010	10:40:00 PM	BCl3 valve closed
8/2/2010	10:40:00 PM	PH3 valve closed
8/2/2010	10:40:00 PM	SiCl4 pre valve closed
8/2/2010	10:40:00 PM	SiCl4 post valve closed
8/2/2010	10:40:00 PM	Main Vac valve closed
8/2/2010	10:40:00 PM	Bubbler valve closed
8/2/2010	10:40:00 PM	Bypass valve opened
8/2/2010	10:40:00 PM	Helium MFC set to  0.000000
8/2/2010	10:40:00 PM	H2 MFC set to  0.000000
8/2/2010	10:40:00 PM	BCl3 MFC set to  0.000000
8/2/2010	10:40:00 PM	PHl3 MFC set to  0.000000
8/2/2010	10:40:00 PM	SiCl4 MFC set to  0.000000
8/2/2010	10:40:00 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	10:40:00 PM	Tube furnace set to 0
8/2/2010	10:40:39 PM	Helium valve closed
8/2/2010	10:40:39 PM	H2 valve closed
8/2/2010	10:40:39 PM	BCl3 valve closed
8/2/2010	10:40:39 PM	PH3 valve closed
8/2/2010	10:40:39 PM	SiCl4 pre valve closed
8/2/2010	10:40:39 PM	SiCl4 post valve closed
8/2/2010	10:40:39 PM	Bubbler valve closed
8/2/2010	10:40:39 PM	Main Vac valve opened
8/2/2010	10:40:39 PM	Bypass valve opened
8/2/2010	10:40:39 PM	Helium MFC set to  0.000000
8/2/2010	10:40:39 PM	H2 MFC set to  0.000000
8/2/2010	10:40:39 PM	BCl3 MFC set to  0.000000
8/2/2010	10:40:39 PM	PHl3 MFC set to  0.000000
8/2/2010	10:40:39 PM	SiCl4 MFC set to  0.000000
8/2/2010	10:40:39 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	10:40:39 PM	Tube furnace set to 0
8/2/2010	10:40:39 PM	Run finished at 10:40 PM
8/2/2010	10:40:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/2/2010	10:41:56 PM	Recipe started at 10:41 PM
8/2/2010	10:41:56 PM	Helium valve closed
8/2/2010	10:41:56 PM	H2 valve closed
8/2/2010	10:41:56 PM	BCl3 valve closed
8/2/2010	10:41:56 PM	PH3 valve closed
8/2/2010	10:41:56 PM	SiCl4 pre valve closed
8/2/2010	10:41:56 PM	SiCl4 post valve closed
8/2/2010	10:41:56 PM	Main Vac valve closed
8/2/2010	10:41:56 PM	Bubbler valve closed
8/2/2010	10:41:56 PM	Bypass valve opened
8/2/2010	10:41:56 PM	Helium MFC set to  0.000000
8/2/2010	10:41:56 PM	H2 MFC set to  0.000000
8/2/2010	10:41:56 PM	BCl3 MFC set to  0.000000
8/2/2010	10:41:56 PM	PHl3 MFC set to  0.000000
8/2/2010	10:41:56 PM	SiCl4 MFC set to  0.000000
8/2/2010	10:41:56 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	10:41:56 PM	Tube furnace set to 100
8/2/2010	10:41:56 PM	Helium valve closed
8/2/2010	10:41:56 PM	H2 valve closed
8/2/2010	10:41:56 PM	BCl3 valve closed
8/2/2010	10:41:56 PM	PH3 valve closed
8/2/2010	10:41:56 PM	SiCl4 pre valve closed
8/2/2010	10:41:56 PM	SiCl4 post valve closed
8/2/2010	10:41:56 PM	Bubbler valve closed
8/2/2010	10:41:56 PM	Main Vac valve opened
8/2/2010	10:41:56 PM	Bypass valve opened
8/2/2010	10:41:56 PM	Helium MFC set to  0.000000
8/2/2010	10:41:56 PM	H2 MFC set to  0.000000
8/2/2010	10:41:56 PM	BCl3 MFC set to  0.000000
8/2/2010	10:41:56 PM	PHl3 MFC set to  0.000000
8/2/2010	10:41:56 PM	SiCl4 MFC set to  0.000000
8/2/2010	10:41:56 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	10:41:56 PM	Tube furnace set to 100
8/2/2010	10:42:56 PM	H2 valve closed
8/2/2010	10:42:56 PM	BCl3 valve closed
8/2/2010	10:42:56 PM	PH3 valve closed
8/2/2010	10:42:56 PM	SiCl4 pre valve closed
8/2/2010	10:42:56 PM	SiCl4 post valve closed
8/2/2010	10:42:56 PM	Bubbler valve closed
8/2/2010	10:42:56 PM	Helium valve opened
8/2/2010	10:42:56 PM	Main Vac valve opened
8/2/2010	10:42:56 PM	Bypass valve opened
8/2/2010	10:42:56 PM	Helium MFC set to  100.000000
8/2/2010	10:42:56 PM	H2 MFC set to  0.000000
8/2/2010	10:42:56 PM	BCl3 MFC set to  0.000000
8/2/2010	10:42:56 PM	PHl3 MFC set to  0.000000
8/2/2010	10:42:56 PM	SiCl4 MFC set to  0.000000
8/2/2010	10:42:56 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	10:42:56 PM	Tube furnace set to 100
8/2/2010	10:51:56 PM	Helium valve closed
8/2/2010	10:51:56 PM	H2 valve closed
8/2/2010	10:51:56 PM	BCl3 valve closed
8/2/2010	10:51:56 PM	PH3 valve closed
8/2/2010	10:51:56 PM	SiCl4 pre valve closed
8/2/2010	10:51:56 PM	SiCl4 post valve closed
8/2/2010	10:51:56 PM	Bubbler valve closed
8/2/2010	10:51:56 PM	Main Vac valve opened
8/2/2010	10:51:56 PM	Bypass valve opened
8/2/2010	10:51:56 PM	Helium MFC set to  0.000000
8/2/2010	10:51:56 PM	H2 MFC set to  0.000000
8/2/2010	10:51:56 PM	BCl3 MFC set to  0.000000
8/2/2010	10:51:56 PM	PHl3 MFC set to  0.000000
8/2/2010	10:51:56 PM	SiCl4 MFC set to  0.000000
8/2/2010	10:51:56 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	10:51:57 PM	Tube furnace set to 100
8/2/2010	10:52:57 PM	H2 valve closed
8/2/2010	10:52:57 PM	BCl3 valve closed
8/2/2010	10:52:57 PM	PH3 valve closed
8/2/2010	10:52:57 PM	SiCl4 pre valve closed
8/2/2010	10:52:57 PM	SiCl4 post valve closed
8/2/2010	10:52:57 PM	Bubbler valve closed
8/2/2010	10:52:57 PM	Helium valve opened
8/2/2010	10:52:57 PM	Main Vac valve opened
8/2/2010	10:52:57 PM	Bypass valve opened
8/2/2010	10:52:57 PM	Helium MFC set to  100.000000
8/2/2010	10:52:57 PM	H2 MFC set to  0.000000
8/2/2010	10:52:57 PM	BCl3 MFC set to  0.000000
8/2/2010	10:52:57 PM	PHl3 MFC set to  0.000000
8/2/2010	10:52:57 PM	SiCl4 MFC set to  0.000000
8/2/2010	10:52:57 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	10:52:57 PM	Tube furnace set to 100
8/2/2010	11:01:57 PM	Helium valve closed
8/2/2010	11:01:57 PM	H2 valve closed
8/2/2010	11:01:57 PM	BCl3 valve closed
8/2/2010	11:01:57 PM	PH3 valve closed
8/2/2010	11:01:57 PM	SiCl4 pre valve closed
8/2/2010	11:01:57 PM	SiCl4 post valve closed
8/2/2010	11:01:57 PM	Bubbler valve closed
8/2/2010	11:01:57 PM	Main Vac valve opened
8/2/2010	11:01:57 PM	Bypass valve opened
8/2/2010	11:01:57 PM	Helium MFC set to  0.000000
8/2/2010	11:01:57 PM	H2 MFC set to  0.000000
8/2/2010	11:01:57 PM	BCl3 MFC set to  0.000000
8/2/2010	11:01:57 PM	PHl3 MFC set to  0.000000
8/2/2010	11:01:57 PM	SiCl4 MFC set to  0.000000
8/2/2010	11:01:57 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	11:01:57 PM	Tube furnace set to 100
8/2/2010	11:02:57 PM	H2 valve closed
8/2/2010	11:02:57 PM	BCl3 valve closed
8/2/2010	11:02:57 PM	PH3 valve closed
8/2/2010	11:02:57 PM	SiCl4 pre valve closed
8/2/2010	11:02:57 PM	SiCl4 post valve closed
8/2/2010	11:02:57 PM	Bubbler valve closed
8/2/2010	11:02:57 PM	Helium valve opened
8/2/2010	11:02:57 PM	Main Vac valve opened
8/2/2010	11:02:57 PM	Bypass valve opened
8/2/2010	11:02:57 PM	Helium MFC set to  100.000000
8/2/2010	11:02:57 PM	H2 MFC set to  0.000000
8/2/2010	11:02:57 PM	BCl3 MFC set to  0.000000
8/2/2010	11:02:57 PM	PHl3 MFC set to  0.000000
8/2/2010	11:02:57 PM	SiCl4 MFC set to  0.000000
8/2/2010	11:02:57 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	11:02:57 PM	Tube furnace set to 100
8/2/2010	11:11:57 PM	Helium valve closed
8/2/2010	11:11:57 PM	H2 valve closed
8/2/2010	11:11:57 PM	BCl3 valve closed
8/2/2010	11:11:57 PM	PH3 valve closed
8/2/2010	11:11:57 PM	SiCl4 pre valve closed
8/2/2010	11:11:57 PM	SiCl4 post valve closed
8/2/2010	11:11:57 PM	Bubbler valve closed
8/2/2010	11:11:57 PM	Main Vac valve opened
8/2/2010	11:11:57 PM	Bypass valve opened
8/2/2010	11:11:57 PM	Helium MFC set to  0.000000
8/2/2010	11:11:57 PM	H2 MFC set to  0.000000
8/2/2010	11:11:57 PM	BCl3 MFC set to  0.000000
8/2/2010	11:11:57 PM	PHl3 MFC set to  0.000000
8/2/2010	11:11:57 PM	SiCl4 MFC set to  0.000000
8/2/2010	11:11:57 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	11:11:57 PM	Tube furnace set to 100
8/2/2010	11:11:58 PM	Run finished at 11:11 PM
8/2/2010	11:31:50 PM	Recipe started at 11:31 PM
8/2/2010	11:31:50 PM	Helium valve closed
8/2/2010	11:31:50 PM	H2 valve closed
8/2/2010	11:31:50 PM	BCl3 valve closed
8/2/2010	11:31:50 PM	PH3 valve closed
8/2/2010	11:31:50 PM	SiCl4 pre valve closed
8/2/2010	11:31:50 PM	SiCl4 post valve closed
8/2/2010	11:31:50 PM	Main Vac valve closed
8/2/2010	11:31:50 PM	Bubbler valve closed
8/2/2010	11:31:50 PM	Bypass valve opened
8/2/2010	11:31:50 PM	Helium MFC set to  0.000000
8/2/2010	11:31:50 PM	H2 MFC set to  0.000000
8/2/2010	11:31:50 PM	BCl3 MFC set to  0.000000
8/2/2010	11:31:50 PM	PHl3 MFC set to  0.000000
8/2/2010	11:31:50 PM	SiCl4 MFC set to  0.000000
8/2/2010	11:31:50 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	11:31:50 PM	Tube furnace set to 100
8/2/2010	11:31:51 PM	Helium valve closed
8/2/2010	11:31:51 PM	H2 valve closed
8/2/2010	11:31:51 PM	BCl3 valve closed
8/2/2010	11:31:51 PM	PH3 valve closed
8/2/2010	11:31:51 PM	SiCl4 pre valve closed
8/2/2010	11:31:51 PM	SiCl4 post valve closed
8/2/2010	11:31:51 PM	Bubbler valve closed
8/2/2010	11:31:51 PM	Main Vac valve opened
8/2/2010	11:31:51 PM	Bypass valve opened
8/2/2010	11:31:51 PM	Helium MFC set to  0.000000
8/2/2010	11:31:51 PM	H2 MFC set to  0.000000
8/2/2010	11:31:51 PM	BCl3 MFC set to  0.000000
8/2/2010	11:31:51 PM	PHl3 MFC set to  0.000000
8/2/2010	11:31:51 PM	SiCl4 MFC set to  0.000000
8/2/2010	11:31:51 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	11:31:51 PM	Tube furnace set to 100
8/2/2010	11:32:03 PM	H2 valve closed
8/2/2010	11:32:03 PM	BCl3 valve closed
8/2/2010	11:32:03 PM	PH3 valve closed
8/2/2010	11:32:04 PM	SiCl4 pre valve closed
8/2/2010	11:32:04 PM	SiCl4 post valve closed
8/2/2010	11:32:04 PM	Bubbler valve closed
8/2/2010	11:32:04 PM	Helium valve opened
8/2/2010	11:32:04 PM	Main Vac valve opened
8/2/2010	11:32:04 PM	Bypass valve opened
8/2/2010	11:32:04 PM	Helium MFC set to  100.000000
8/2/2010	11:32:04 PM	H2 MFC set to  0.000000
8/2/2010	11:32:04 PM	BCl3 MFC set to  0.000000
8/2/2010	11:32:04 PM	PHl3 MFC set to  0.000000
8/2/2010	11:32:04 PM	SiCl4 MFC set to  0.000000
8/2/2010	11:32:04 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	11:32:04 PM	Tube furnace set to 100
8/2/2010	11:41:04 PM	Helium valve closed
8/2/2010	11:41:04 PM	H2 valve closed
8/2/2010	11:41:04 PM	BCl3 valve closed
8/2/2010	11:41:04 PM	PH3 valve closed
8/2/2010	11:41:04 PM	SiCl4 pre valve closed
8/2/2010	11:41:04 PM	SiCl4 post valve closed
8/2/2010	11:41:04 PM	Bubbler valve closed
8/2/2010	11:41:04 PM	Main Vac valve opened
8/2/2010	11:41:04 PM	Bypass valve opened
8/2/2010	11:41:04 PM	Helium MFC set to  0.000000
8/2/2010	11:41:04 PM	H2 MFC set to  0.000000
8/2/2010	11:41:04 PM	BCl3 MFC set to  0.000000
8/2/2010	11:41:04 PM	PHl3 MFC set to  0.000000
8/2/2010	11:41:04 PM	SiCl4 MFC set to  0.000000
8/2/2010	11:41:04 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	11:41:04 PM	Tube furnace set to 100
8/2/2010	11:42:04 PM	H2 valve closed
8/2/2010	11:42:04 PM	BCl3 valve closed
8/2/2010	11:42:04 PM	PH3 valve closed
8/2/2010	11:42:04 PM	SiCl4 pre valve closed
8/2/2010	11:42:04 PM	SiCl4 post valve closed
8/2/2010	11:42:04 PM	Bubbler valve closed
8/2/2010	11:42:04 PM	Helium valve opened
8/2/2010	11:42:04 PM	Main Vac valve opened
8/2/2010	11:42:04 PM	Bypass valve opened
8/2/2010	11:42:04 PM	Helium MFC set to  100.000000
8/2/2010	11:42:04 PM	H2 MFC set to  0.000000
8/2/2010	11:42:04 PM	BCl3 MFC set to  0.000000
8/2/2010	11:42:04 PM	PHl3 MFC set to  0.000000
8/2/2010	11:42:04 PM	SiCl4 MFC set to  0.000000
8/2/2010	11:42:04 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	11:42:04 PM	Tube furnace set to 100
8/2/2010	11:51:04 PM	Helium valve closed
8/2/2010	11:51:04 PM	H2 valve closed
8/2/2010	11:51:04 PM	BCl3 valve closed
8/2/2010	11:51:04 PM	PH3 valve closed
8/2/2010	11:51:04 PM	SiCl4 pre valve closed
8/2/2010	11:51:04 PM	SiCl4 post valve closed
8/2/2010	11:51:04 PM	Bubbler valve closed
8/2/2010	11:51:04 PM	Main Vac valve opened
8/2/2010	11:51:04 PM	Bypass valve opened
8/2/2010	11:51:04 PM	Helium MFC set to  0.000000
8/2/2010	11:51:04 PM	H2 MFC set to  0.000000
8/2/2010	11:51:04 PM	BCl3 MFC set to  0.000000
8/2/2010	11:51:04 PM	PHl3 MFC set to  0.000000
8/2/2010	11:51:04 PM	SiCl4 MFC set to  0.000000
8/2/2010	11:51:04 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	11:51:04 PM	Tube furnace set to 100
8/2/2010	11:52:04 PM	H2 valve closed
8/2/2010	11:52:04 PM	BCl3 valve closed
8/2/2010	11:52:04 PM	PH3 valve closed
8/2/2010	11:52:04 PM	SiCl4 pre valve closed
8/2/2010	11:52:04 PM	SiCl4 post valve closed
8/2/2010	11:52:04 PM	Bubbler valve closed
8/2/2010	11:52:04 PM	Helium valve opened
8/2/2010	11:52:04 PM	Main Vac valve opened
8/2/2010	11:52:04 PM	Bypass valve opened
8/2/2010	11:52:04 PM	Helium MFC set to  100.000000
8/2/2010	11:52:04 PM	H2 MFC set to  0.000000
8/2/2010	11:52:04 PM	BCl3 MFC set to  0.000000
8/2/2010	11:52:04 PM	PHl3 MFC set to  0.000000
8/2/2010	11:52:04 PM	SiCl4 MFC set to  0.000000
8/2/2010	11:52:04 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	11:52:04 PM	Tube furnace set to 100
8/2/2010	11:54:37 PM	Helium valve closed
8/2/2010	11:54:37 PM	H2 valve closed
8/2/2010	11:54:37 PM	BCl3 valve closed
8/2/2010	11:54:37 PM	PH3 valve closed
8/2/2010	11:54:37 PM	SiCl4 pre valve closed
8/2/2010	11:54:37 PM	SiCl4 post valve closed
8/2/2010	11:54:37 PM	Bubbler valve closed
8/2/2010	11:54:37 PM	Main Vac valve opened
8/2/2010	11:54:37 PM	Bypass valve opened
8/2/2010	11:54:37 PM	Helium MFC set to  0.000000
8/2/2010	11:54:37 PM	H2 MFC set to  0.000000
8/2/2010	11:54:37 PM	BCl3 MFC set to  0.000000
8/2/2010	11:54:37 PM	PHl3 MFC set to  0.000000
8/2/2010	11:54:37 PM	SiCl4 MFC set to  0.000000
8/2/2010	11:54:37 PM	Bypass solenoid MFC set to  0.000000
8/2/2010	11:54:37 PM	Tube furnace set to 100
8/2/2010	11:54:38 PM	Run finished at 11:54 PM
8/2/2010	11:55:54 PM	Helium MFC set to  100.000000
8/2/2010	11:55:56 PM	Helium valve opened
